晶圆测试说明书Cascade-11861-6-Manual.pdf - 第31页

Chapter 1: Station Overview • 7 Applications The probe station is ideal for testing te mperature-sensitive devices becaus e the MicroChamber's low volume enables rapid temperature cycling and better temperature cont…

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Summit 11K/12K Probe Station User’s Guide
A separate vacuum connection panel kit is available for the high-stability bridge
mount.
Fig. 5. Connection panel for large-area bridge mount.
Fig. 6. Connection panel for high-stability bridge mount (left and right).
Chapter 1: Station Overview
•
7
Applications
The probe station is ideal for testing temperature-sensitive devices because the
MicroChamber's low volume enables rapid temperature cycling and better
temperature control. The station is also useful for testing light-sensitive devices.
Other applications include device and process characterization, as well as
reliability testing. Depending on the probes and accessories that customize this
probe station, you can make:
• DC or capacitance measurements
• High-frequency measurements
Accessories
LARGE-AREA BRIDGE MOUNT
HIGH-STABILITY BRIDGE MOUNT
X-Y travel 203 x 127 mm (8 x 5-inch)
Lift repeatability 1 mil (25.4 µ) typical
Vertical lift range 3-inch (7.6 cm)
Weight supported 20 lb. (maximum)
X-Y travel 25.4 x 25.4 mm (1 x 1-inch)
Lift repeatability 1µ (0.04 mil) typical
Tilt-back range 2 to 3-inch (5.08-7.62 cm)
Weight supported 70 lb. (maximum)
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Summit 11K/12K Probe Station User’s Guide
OPTICS
RF POSITIONERS
DCM POSITIONERS
Mitutoyo Finescope 60 with 20X to 4000X magnification range
Olympus ZoomStereo 60 with 20X to 126X magnification range
Optem A-Zoom microscope video system w/125X to 4000X magnification w/
10X objective
Travel 12.7 mm (0.5-inch) in x- and y-axis,
11.7 mm (0.46-inch) in z-axis
Rigidity 100-micron (4 mil) deflection with 500
g (17.5 oz.) force on the connector of
the probe
Resolution 625-micron (25 mil) per turn, or 1.76
micron per degree
Planarization + 5° with micrometer at each arm.
Travel 12.7 mm (0.5-inch) in each axis
(x-y-z)
Rigidity 100-micron (4 mil) deflection with
500 g (17.5 oz.) force on connector of
probe
Resolution 317-micron (12.5 mil) per turn,
or 0.88 micron per degree
Fig. 7. Tilt-back microscope.