晶圆测试说明书Cascade-11861-6-Manual.pdf - 第100页

76 • Summit 11K/12K Probe Station User’ s Guide

Chapter 6: Troubleshooting •

During measurements. Ground the chuck with the shorting

plug.

--OR--

Connect the chuck to a voltage

source to prevent slight charge

accumulation.

During measurements. For temperatures above 40°C, dry

airflow is not required.

--OR--

For temperatures below 40°C, turn on

dry airflow to 2 - 3 CFM.

--OR--

If you will be transitioning between

temperatures above and below 40°C,

turn on dry airflow to 2 - 3 CFM.

When station is not in use. We recommend that you install the

shorting plug whenever the station is

not in use to prevent charges from

building up in the chuck.

• Summit 11K/12K Probe Station User’s Guide

Chapter 7: Service •

CHAPTER

Service Chapter 9

This section explains what to do when your Cascade customer service

representative requests that you return the probe station for service.

Probe station repairs carry either a 90-day warranty or the balance of your

original probe station warranty if greater.

Preparing to Ship

RMA NUMBER

Before shipping a probe station to Cascade, obtain a Return Material

Authorization number (RMA #). Contact your nearest Cascade sales office or

Cascade customer service at (800) 550-3279.

Write the following information on a tag and attach it to the probe station:

• Owner's name and address

•RMA number

• Probe station model number

• Probe station serial number (back left of probe station)

• Description of the service required or failure indications

REPACKING

To pack probes and

accessories, see

specific product

documentation.

Always use the original packing materials. Otherwise, you’ll void your warranty.

If you cannot locate the shipping materials or hardware, contact your Cascade

representative.

Remove all probes and accessories from the probe station, including the

microscope. Do not ship them unless they are associated with the failure

symptoms.

To disconnect and disassemble the probe station, and attach the shipping

restraints, reverse the steps in the Installing section of this manual.