晶圆测试说明书Cascade-11861-6-Manual.pdf - 第88页
64 • Summit 11K/12K Probe Station User’ s Guide
Chapter 4: Verifying and Operating •
63
Before loading and unloading wafers, take the following precautions:
• Make sure that the access door interlock connects to the chuck-biasing power-
supply’s interlock and operates correctly.
• Set the power source to zero volts before changing the wafer.
• Make sure that the chuck is close to room temperature.
• In addition to the connection to the power-supply’s interlock, you can set up
prober control software to indicate whether the door is open or closed.
CAUTION
Avoid touching the chuck. Chuck surface contaminants can interfere with electrical
contact between the chuck and wafer.
To load a wafer
1. Raise the Z-lever.
2. Open the MicroChamber access door.
3. Rotate the roll-out stage handle counterclockwise to unlock, then pull the
stage forward.
4. Turn off chuck vacuum.
5. Use wafer tweezers to place the wafer in the chuck center, aligning it visually.
6. Turn on chuck vacuum.
7. Using the roll-out stage handle, push back the stage all the way, and then
rotate the handle clockwise to lock the roll-out stage.
8. Close the MicroChamber access door.
To unload a wafer
Follow the first four preceding steps, and then:
1. Use wafer tweezers to remove the wafer.
2. Using the roll-out stage handle, push back the stage all the way, and then
rotate the handle clockwise to lock the roll-out stage.
3. Close the MicroChamber access door.
64
• Summit 11K/12K Probe Station User’s Guide
Chapter 5: Maintaining •
65
CHAPTER
5
Maintaining Chapter 7
WARNING
To avoid potential damage to the prober or to yourself, disconnet power from the
probe station before performing maintenance procedures.
Your probe station is designed and built for long, trouble-free service. Follow
preventive maintenance procedures to achieve peak operation, to prolong probe
station life, and to avoid unscheduled downtime.
This chapter explains how to maintain a Summit probe station. To maintain
probes, positioners, or other components that shipped with the station, refer to
the documentation that accompanied these items.
Preventive Maintenance Procedures
WARNING
Isopropyl alcohol (IPA) is toxic and flammable. To avoid personal injury, follow the
instructions on the Material Safety Data Sheet.
You can damage the probe station by using improper solvents or abrasive
cleaners. Use only industrial-grade isopropyl alcohol (IPA) only where indicated.
Do not use IPA, or any other chemical, on the lead screws, bearings, sliding plates
in the MicroChamber, or the surfaces that they contact.
N
OTE
Dust or debris can interfere with probe-to-tip contact and affect your measurement
accuracy.
CLEANING THE PROBE STATION
Clean the probe station monthly, or more often if your process creates
contaminants.
To clean the probe station
• Use a small vacuum cleaner, such as a printer vacuum, to remove dust and
debris from the interior of the probe station and hard-to-reach areas. Avoid
knocking debris into crevices or spaces between moving parts.
• Blow dry air or nitrogen over the station surface to remove dust and large
chunks of debris
• Vacuum the interior of the MicroChamber
• Wipe the chuck with a soft, lint-free cloth, lightly dampened with IPA