晶圆测试说明书Cascade-11861-6-Manual.pdf - 第42页

18 • Summit 11K/12K Probe Station User’ s Guide 12800 G UARDED T HERMAL P RO B E S TATIONS The 12800 offers the same thermal testing capacity as a 12700, but with an advanced reduced-noise th ermal chuck. Using Cascade M…

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Chapter 2: Station Specifications •
17
12600 THERMAL PROBE STATIONS
The 12600 provides temperature control of wafers over a -65
o
C to +200
o
C range
(300
o
C on HT version). Since the wafer is enclosed in the low-volume
MicroChamber, temperature transitions are fast. You can verify the calibration at
each temperature level using a Cascade ISS on an integrated auxiliary stage and
Cascade's VNA calibration software.
Chuck Specifications
12700 GUARDED THERMAL PROBE STATIONS
The 12700 offers the same thermal testing capacity as a 12600, but with an
advanced reduced-noise thermal chuck. Using Cascade Microtech’s patented
FemtoGuard thermal chuck technology, the 12700 provides wafer temperature
control in a reduced noise and capacitance environment. Chuck noise is reduced
1000-times over standard thermal chucks. The noise on topside probes reduces to
fA levels.
Chuck Specifications
Flatness 25 micron (1 mil) to 130 °C, 51 micron (2
mil) to 200 °C
Residual capacitance, chuck to
shield (standard version)
< 950 pF
Isolation, chuck to shield > 1 GΩ at 500-volts DC at 25 °C
Breakdown bias voltage > 500-volts
Temperature range
-65 °C to 200 °C maximum (controller
dependent). 300
o
C on HT version.
Temperature uniformity +0.5 °C or +0.5%,
whichever is higher
Vacuum distribution area 13, 75, or 152 mm (selectable)
Auxiliary chucks Two with individual vacuum control
Flatness 25 micron (1 mil) to 130 °C, 51 micron (2
mil) to 200 °C
Residual capacitance, chuck to
shield
< 50 pF
Capacitance variation over chuck
surface
≤ 30 fF
Isolation, chuck to shield > 1 TΩ
Breakdown bias voltage > 500-volts
Chuck leakage current, thermal
chuck on
0 to 100-volts: < 50 fA
Chuck leakage current, thermal
chuck off
0 to 100-volts, 20 fA
Temperature range
-65 °C to 200 °C maximum (controller
dependent). 300
o
C on HT version.
Temperature uniformity +0.5 °C or 0.5% whichever is higher
Vacuum distribution area 13, 75, or 152 mm (selectable)
Auxiliary chucks Two with individual vacuum control
18
• Summit 11K/12K Probe Station User’s Guide
12800 GUARDED THERMAL PROBE STATIONS
The 12800 offers the same thermal testing capacity as a 12700, but with an
advanced reduced-noise thermal chuck. Using Cascade Microtech’s patented
FemtoGuard thermal chuck technology, the 12700 provides wafer temperature
control in a reduced noise and capacitance environment. Chuck noise is reduced
1000-times over standard thermal chucks. The noise on topside probes reduces to
fA levels.
Chuck Specifications
Flatness 25-micron (1 mil) to 130°C, 51-micron
(2 mil) to 200°C
Residual capacitance, chuck to shield 1 pF
Capacitance variation over chuck
surface
3 fF
Isolation, chuck to shield > 1 TΩ
Breakdown bias voltage > 500-volts
Chuck leakage current, thermal
chuck on
0 to 100 volts: < 50 fA
Chuck leakage current, thermal
chuck off
0 to 100 volts, 20 fA
Temperature range
-65 °C to 200 °C maximum (controller
dependent). 300
o
C on HT version.
Temperature uniformity +0.5 °C or 0.5% whichever is higher
Vacuum distribution area 13, 75, or 152 mm (selectable)
Auxiliary chucks Two with individual vacuum control
Chapter 2: Station Specifications •
19
11000-Series
DIMENSIONS
PLATEN
ROTARY STAGE
ROLL-OUT STAGE
CHUCK
For in-depth chuck specifications, see the individual station numbers.
X-Y STAGE
MICROCHAMBER
11520, 11600, 11700, 11800 Only11100 Probe Stations
Base dimensions 68 cm (27 in.) wide x 76 cm (30 in.)
deep
Typical height to eye pieces 55 cm (22 in.)
Weight 150 kg (330 lb.) including optics
mount
Rigidity <50-micron (2 mil) for 4.5 kg (10 lb.)
lateral or vertical force
Z-lift range 5.5 mm (0.22 in.) linear lift
Z-lift repeatability <2-micron (0.08 mil)
Material Nickel-plated steel
Travel +
7°
Resolution 1° per turn
Travel 25 cm (10 in.)
Size 200 mm (8 in.) diameter
(150 mm on 6-in. stations)
Surface Gold-plated or nickel-plated
aluminum, with provisions for
grounding or biasing
Travel 203 mm x 203 mm
(8 in. x 8 in.)
Resolution 0.2 in. per turn (5 mm)
Bearings Cross-roller
EMI Isolation Yes