晶圆测试说明书Cascade-11861-6-Manual.pdf - 第36页
12 • Summit 11K/12K P robe Station User’s Guide
Chapter 1: Station Overview
•
11
On the Summit 1X600-series, you can apply a bias voltage or ground the chuck
surface through the BNC connector located at the left back of the MicroChamber.
The center of the BNC connector carries the chuck surface bias or guard voltage.
The outer shield of the BNC connector provides a connection to the
MicroChamber.
On the Summit 1X700 and 1X800-series, you can apply a bias or guard voltage, or
ground the chuck surface through two Kelvin-type triax connectors — located at
the left-back of the MicroChamber.
Fig. 8. Force, guard, and shield connections.
MicroChamber
connection
Chuck guard-layer
connection
Chuck surface
connection
Shield
Guard
Force/
Sense
Triax to Chuck
12
•
Summit 11K/12K Probe Station User’s Guide
Chapter 2: Station Specifications •
13
CHAPTER
2
Station Specifications Chapter 4
All Series
FACILITY REQUIREMENTS
See also, the Summit 11K/12K section of Cascade’s Probe Station Facility Guide.
HIGH-STABILITY MICROSCOPE BRIDGE MOUNT OPTION
COMPUTER
Call Cascade’s Customer Support for the latest requirements. See also,
www.cascademicrotech.com.
12000-Series
DIMENSIONS
Vacuum 400 mm (15-inches) of Hg min.
Power 115 V at 2 A, 230 V at 1 A, 50/60 Hz
Dry air 4.3 liters per sec. (9 SCFM) with dew
point < -70 °C. Can be produced with
optional air dryer.
Additional requirements As needed for thermal controller.
Compressed air 0.1 liters/sec (0.2 CFM@ 70 psi. min.)
Base dimensions 76 cm (30 in.) wide x 68 cm (27 in.)
deep
Typical height to eye pieces 58 cm (23 in.)
Weight 165 kg (360 lb.) including optics mount,
not including microscope