晶圆测试说明书Cascade-11861-6-Manual.pdf - 第95页
Chapter 6: Troubleshooting • 71 X-Y S TAGE OR Z S TAGE D OES N OT M OVE V ACU UM N OT D ETECTED BY S ENSOR OR W AFER N OT H ELD ON C HUCK J OYSTICK E RROR M ESSAGE OR S TAGE W ANDERS IN J OYSTICK M ODE (12000-series Only…
70
• Summit 11K/12K Probe Station User’s Guide
COMPUTER DOES NOT TURN ON; NOTHING WORKS
(12000-series Only)
STAGE WHINES ON ATTEMPTED MOVE
(12000-series Only)
WARNING
First, turn the power OFF.
Area to check Check this Refer to
Computer Reseat all boards. Installing
Battery on motherboard
OK?
––
Power line voltage
switch correct for lab?
Installing
Plugged in and turned
on?
Installing
Boots as stand-alone
computer?
––
Cables Installed correctly? Installing
Installed in correct slots
at both ends?
Installing
No bent pins on
connectors?
––
Area to check Check this Refer to
X-Y stage or Z stage Shipping restraint
removed?
Installing
MicroChamber Shipping restraints
removed?
Installing
Chapter 6: Troubleshooting •
71
X-Y STAGE OR Z STAGE DOES NOT MOVE
VACUUM NOT DETECTED BY SENSOR OR WAFER NOT HELD ON CHUCK
JOYSTICK ERROR MESSAGE OR STAGE WANDERS IN JOYSTICK MODE
(12000-series Only)
Area to check Check this Refer to
Probe station
12000 and 11000-series
Shipping restraint
removed?
Installing
12000-series Fuses OK? ––
Plugged in and turned
on?
Installing
Main control cable
12000-series
Installed correctly? Installing
Installed in correct slots
at both ends?
Installing
No bent pins on
connectors?
Installing
Area to check Check this Refer to
Vacuum supply
12000 and 11000-series
Turned on? ––
At least 400 mm (15 in.)
of Hg?
––
Connected to VAC IN
on probe station?
Installing
Your DUT Flat on the chuck? ––
Centered on the
chuck?
––
Center vacuum size set
to not larger than your
DUT?
Verifying and Operating
Aux stage vacuum Correct size device(s) in
place where vacuum is
on?
Verifying and Operating
Turned off where not
used?
Verifying and Operating
Area to check Check this Refer to
Joystick tension Set to return the joystick
to center?
Reset, then reinitialize.
Verifying and Operating
Joystick cable Connected to
computer?
Reconnect, then
reinitialize.
Installing
If none of the above eliminates the problem, recalibrate the joystick. Refer to
the Control Panel in Windows.
72
• Summit 11K/12K Probe Station User’s Guide
MICROSCOPE LIGHT IS NOT ON
AUXILIARY POWER DOES NOT FUNCTION
(12000-series Only)
NOTE
The auxiliary power test requires you to plug a light into AUX POWER on the probe
station manifold.
Area to check Check this Refer to
Power for light Power cord plugged
into MICROSCOPE
POWER, not AUXILIARY
POWER on probe
station, or plugged into
wall outlet?
Installing
12000-series only Probe station power
connected?
Installing
12000-series only fuses Probe station fuse OK? ––
Light source fuse OK? Microscope
documentation
Light bulb OK? Microscope
documentation
Microscope Aperture shutter slide
open?
Microscope
documentation
TopHat cover Shutter open? Verifying and Operating
12000-series only
PCS status button
Indicates light is on? PCS User Guide and
online Help
Area to check Check this Refer to
Power for AUX Power cord plugged
into AUXILIARY POWER,
not MICROSCOPE
POWER on probe
station?
Installing
Probe station power
connected?
Installing
Fuses Probe station fuse OK?
Light source fuse OK?
Auxiliary equipment
documentation
Light bulb OK?
Auxiliary equipment
documentation
PCS status button Indicates power is on?
Nucleus or PCS User’s
Guide and online Help