晶圆测试说明书Cascade-11861-6-Manual.pdf - 第32页
8 • Summit 11K/12K Probe Station User’s Guide O PTICS RF P OSITIONERS DCM P OSITIONERS Mitutoyo Finescope 60 with 20X to 4000X magnification range Olympus ZoomStereo 60 with 20X to 126X m agnification range Optem A-Zoom …
Chapter 1: Station Overview
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Applications
The probe station is ideal for testing temperature-sensitive devices because the
MicroChamber's low volume enables rapid temperature cycling and better
temperature control. The station is also useful for testing light-sensitive devices.
Other applications include device and process characterization, as well as
reliability testing. Depending on the probes and accessories that customize this
probe station, you can make:
• DC or capacitance measurements
• High-frequency measurements
Accessories
LARGE-AREA BRIDGE MOUNT
HIGH-STABILITY BRIDGE MOUNT
X-Y travel 203 x 127 mm (8 x 5-inch)
Lift repeatability 1 mil (25.4 µ) typical
Vertical lift range 3-inch (7.6 cm)
Weight supported 20 lb. (maximum)
X-Y travel 25.4 x 25.4 mm (1 x 1-inch)
Lift repeatability 1µ (0.04 mil) typical
Tilt-back range 2 to 3-inch (5.08-7.62 cm)
Weight supported 70 lb. (maximum)
8
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Summit 11K/12K Probe Station User’s Guide
OPTICS
RF POSITIONERS
DCM POSITIONERS
Mitutoyo Finescope 60 with 20X to 4000X magnification range
Olympus ZoomStereo 60 with 20X to 126X magnification range
Optem A-Zoom microscope video system w/125X to 4000X magnification w/
10X objective
Travel 12.7 mm (0.5-inch) in x- and y-axis,
11.7 mm (0.46-inch) in z-axis
Rigidity 100-micron (4 mil) deflection with 500
g (17.5 oz.) force on the connector of
the probe
Resolution 625-micron (25 mil) per turn, or 1.76
micron per degree
Planarization + 5° with micrometer at each arm.
Travel 12.7 mm (0.5-inch) in each axis
(x-y-z)
Rigidity 100-micron (4 mil) deflection with
500 g (17.5 oz.) force on connector of
probe
Resolution 317-micron (12.5 mil) per turn,
or 0.88 micron per degree
Fig. 7. Tilt-back microscope.
Chapter 1: Station Overview
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9
THERMAL CHUCK CONTROLLER & AIR DRYER
(11600, 12600, 11700, 12700)
PROBE CARD ADAPTER
Standard Accessories
Your station will come with a large assortment of accessories, such as a contact
substrate, dust cover, etc., in addition to those accessories listed below.
11100, 12100
11500, 12500, 11600, 12600, 11700, 12700, 11800, 12800
NOTE
Cascade recommends that you install a triax-shorting plug whenever the station is
not in use to prevent charges from building up in the chuck. We also recommend
that you install the triax-shorting plug when you are not measuring substrate
current or biasing the chuck.
Recommended Configurations
For DC or capacitance measurements, Cascade recommends:
• DCM vacuum-base or fixed-base DC and RF positioners with low current
(LC) triax adapters
• DCP probes in standard or Kelvin configurations
• LC cables and accessories for low-level measurements
Available temperature ranges -65 °C to 200 °C or 0 °C to 200 °C (300
°C for HT versions)
Air dryer option available yes
Manufactured by Temptronic Corp.
Probe card dimensions 4.5-inch wide
Manual Wrench set
Appropriate power cords for country
of use (12100)
Manual Wrench set
Microscope eyepiece covers Appropriate power cords for country of use
Microscope grounding clip Interlock cable
Triax cap (N/A for 11100,
12100, 11600, 12600)
Triax shorting plug (N/A for 11100, 12100, 11600,
12600)