晶圆测试说明书Cascade-11861-6-Manual.pdf - 第26页

2 • Summit 11K/12K Probe Station User’s Guide FemtoGuard/AttoGuard Chuck Options The patented FemtoGuard/AttoGuard chucks and guarded coaxial probes provide an ultra-low ca pacitance for sw ept measurements without capac…

Chapter 1: Station Overview

•

CHAPTER

Station Overview Chapter 3

This overview covers:

• General features of the Summit 11000-series (manually-operated) and 12000-

series (semiautomatic) analytical probe stations

• Applications

• Facilities and computer requirements

• Optional accessories

• Standard accessories

• Recommended configurations

• Environmental considerations

• How to use the emergency stop button (EMO)

Features

The Summit 11500-, 12500-, 11600-, 12600-, 11700-, 12700-, and 11800-, 12800-series

probe stations enable you to make test measurements inside an integral, low-

noise, shielded and light-tight MicroChamber.

CHUCK: SUMMIT 11500, 12500, 11700, 12700 AND 11800, 12800

This chuck is isolated and guarded, making it ideal for ultra-low-level leakage DC

and CV measurements. The chuck guard connects to the external test equipment’s

Source Monitor Unit (SMU) guard. A connection panel provides convenient

triaxial or quadraxial connections.

The low-capacitance, guarded-chuck environment enables you to make accurate

current and voltage measurements. The chuck significantly reduces

measurement-settling time and eliminates the need to make offset capacitance

corrections.

Two Kelvin-type triax connectors for chuck-bias voltage and sense, or for chuck

grounding, are located on the left back of the MicroChamber. The access door

includes an interlock switch and connector so you can automatically turn off the

chuck biasing power supply when you open the door.

Guarded Thermal Chuck Option

A guarded version of the thermal chuck reduces chuck noise down to femtoamp

level.

•

Summit 11K/12K Probe Station User’s Guide

FemtoGuard/AttoGuard Chuck Options

The patented FemtoGuard/AttoGuard chucks and guarded coaxial probes

provide an ultra-low capacitance for swept measurements without capacitive

error currents.

The FemtoGuard option increases guarding on the chuck and in the

MicroChamber so you can measure currents in the low femtoamp range.

The AttoGuard option extends the instrument guard under, around, and over the

wafer, providing shielding to femtoamp noise levels.

MICROCHAMBER

The patented MicroChamber is an enclosure surrounding the chuck, providing a

controlled probing environment that shields wafer and probes from moisture,

light, and electrical noise.

•The wafer is protected inside the MicroChamber. Probes are never jarred off

submicron targets by closing dark box or MicroChamber doors.

• You can electrically isolate the MicroChamber from the probe station and

purge it with dry air or inert gas.

Fig. 1. Summit 11500, 11700, 12500, 12700 and 12800 Guarded Chuck Connections.

Chuck shield layer and

MicroChamber connection

Chuck bias

triax connector

Chuck guard layer

connection

Chuck surface

connection

Guard ring

Fig. 2. Attoguard.

Chapter 1: Station Overview

•

• Probe station controls reside outside the enclosed area to provide easy access

to probe positioners, the microscope and positioning controls.

Interlock Switches for Access Door

To protect you from hazardous voltages on the chuck, the MicroChamber

provides two access-door interlock switches. The software-controlled switch

closes when the MicroChamber access door closes, and opens when the access

door opens. In addition, a hardware interlock BNC is on the right rear of the

probe station (fig. 9 on p. 26 and fig. 10 on p. 26). You must connect a cable from

the BNC connector to the interlock connector on the chuck-biasing power supply.

PRECISION POSITIONING

12000-Series Only

The closed-loop position feedback system provides micron accuracy for test

measurements. Submicron moves enable you to test the smallest wafer

geometries. Stepper motors ensure fast and quiet X-Y-Z positioning.

COMPUTER CONNECTION

12000-Series Only

System electronics are integrated into the probe-station's base, with a single

control cable connecting the station to the computer.

See also, the Facility and Computer Requirements section for more information

about the minimum computer configuration.

Fig. 3. MicroChamber, access door, and roll-out stage.

Roll-out

stage

handle

Chuck

MicroChamber

access door