晶圆测试说明书Cascade-11861-6-Manual.pdf - 第83页
Chapter 4: Verifying and Operating • 59 • If you suspect a hardware problem • Before you call Cascade Customer Service Test your probe station as explained in th is section and in online Help. If your probe station fails…
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• Summit 11K/12K Probe Station User’s Guide
For example, for a small device or 2-inch wafer, turn on the switch labeled 13 mm.
For a 3-, 4-, or 5-inch wafer, turn on both the 13 mm and 75 mm switches. For a 6-
or 8-inch wafer, turn on all three switches
(13 mm, 75 mm, and 150 mm).
To turn off vacuum, flip all three switches to the off (down) position. If the paper
does not hold down as expected, make sure that:
• Your vacuum source works properly;
• The hose connects properly to both the vacuum source and to the probe
station.
VERIFYING THE MICROSCOPE AND VIDEO ADJUSTMENTS
CAUTION
TILT-BACK BRIDGE
Center the programmable scope transport before raising or lowering the tilt-back
bridge or damage can occur to the probe station and/or accessories. Scope travel
is limited to 1-inch in the x-, y-axes when using the TopHat.
Nucleus software supports the programmable scope transport if the optional
autoprobe module (PN 123-567) is purchased. This module controls the ECX-56
Box accessories.
1. Move the stage to its approximate center of X-Y travel.
2. Focus the microscope on the chuck top.
3. Move the stage in the X- and Y-axes, and check that the video on the monitor
moves in the same direction. If it travels in the opposite direction, the camera
is not properly placed on the adapter. Loosen the thumbscrews on the camera
and rotate it 180 degrees; then re-tighten.
4. Move the optics bridge in the X- and Y-axis and make sure that it travels
smoothly.
5. Place the microscope in the center of travel and focus on the chuck top.
6. Move the optics bridge in the X- and Y-axes and make sure that the
microscope stays in focus throughout its travel.
Verifying the 12000-Series Station with Software
NOTE
Two different software applications, PCS and Nucleus, are available for controlling
the Summit 12000-series semiautomatic probe stations. The following section
deals with PCS, which contains the “verify” program. If you are using Nucleus, see
the Nucleus User’s Guide.
The Verify software checks the probe station hardware except for the joystick,
which has its own test. Click the “Verify” icon to run the tests:
• During installation
• During preventive maintenance
Chapter 4: Verifying and Operating •
59
• If you suspect a hardware problem
• Before you call Cascade Customer Service
Test your probe station as explained in this section and in online Help. If your
probe station fails any verification test, see the Troubleshooting chapter, and if
you cannot correct the problem, contact Cascade customer service for assistance.
LAUNCHING VERIFY
Close (exit) all probe station software, including the Cascade program group
items and other applications that link to the probe station through DDE. Verify
runs low-level tests and resets values that the other software needs.
CAUTION
An application left open does not properly control the hardware after these tests
are run.
During installation, a Cascade Microtech program group was created on the
Program Manager desktop. “Verify” is in that program group
From the desktop, double-click the Verify icon in the Cascade window. You
should see the Verify window.
RUNNING THE VERIFY SOFTWARE
Normally, you run all tests sequentially. However, you may want to run a single
test such as Light after you replace a microscope light bulb.
NOTE
If you run tests out of sequence, the probe station will not respond as it would if
you ran the tests in sequence. Therefore, you may receive a false failure message.
Fig. 46. Verify test status dialog.
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• Summit 11K/12K Probe Station User’s Guide
Point and click the mouse in the same way you use the mouse with other
Windows applications.
To execute the tests
• Click a test button to run a single test only.
--OR--
• Click the All button to run all tests sequentially.
--OR--
• Choose a test from the Test menu.
--OR--
• Choose All from the test menu to run all tests sequentially.
Some tests, such as Motors and Light, require your observation and input for a
pass or fail decision.
To view a test’s dialog box without running the test
Choose Virtual mode from the Option menu, then choose the test.
NOTE
You must turn Virtual mode off before running a test on the hardware.
To clear the results of tests
Choose Clear status from the File menu.
To run tests repeatedly
Cascade recommends that you occasionally run all the tests ten times in a row.
Click the Exercise button to run the tests repeatedly. Each exercise cycle takes
about one minute to complete.
• Choose Exercise during installation.
• Choose Exercise if you suspect the probe station has an intermittent problem.
To exit verify
• Choose Exit from the File menu to exit Verify.
--OR--
• Click the Close button.
To get more information on verify software
Click the Help button or open the Help menu.