晶圆测试说明书Cascade-11861-6-Manual.pdf - 第3页

Before You Begin • i Before Y ou Begin Chapter 1 About This Guide Welcome to the Summit 11000- and 12000-Series Probe Station User’s Guide . This guide contains information about inst alling, verifying, operating, and ma…

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Before You Begin

•

Before You Begin Chapter 1

About This Guide

Welcome to the Summit 11000- and 12000-Series Probe Station User’s Guide. This

guide contains information about installing, verifying, operating, and

maintaining your probe station.

• The Summit 12000-series 200-mm (8-inch) probe stations are referred to in this

manual as the 12000-series.

• The Summit 11000-series 200-mm (8-inch) probe stations are referred to in this

manual as the 11000 -series.

• A member of either series is referred to as a probe station.

Variations of these series are available, such as the 150-mm (6-inch) probe station,

and those stations with high-temperature (HT) configurations.

GUIDE CONTENTS

This guide covers hardware installation, operation, and maintenance for the

Summit 11000- and 12000-series probe stations.

The 12000-series probe station comes with the following information:

• Programming Communications Guide

• Prober Control Software User’s Guide and online Help

• Probe plan Editor User’s Guide and online Help

• WinCal User Guide and online Help (if ordered)

• GPIB online Help

• Verify online Help

• DDE online Help

• DC/CV Parametric Configuration Guide

For information on installing, operating, and maintaining other parts of your test

system, see the following:

• Software documentation

•Probe documentation

• Positioner documentation

• Test equipment literature

• Microscope documentation

• Thermal equipment documentation

•

Summit 11K/12K Probe Stations User’s Guide

CHAPTER CONTENTS

NOTATIONAL CONVENTIONS

This manual uses the following conventions:

• When directing the user to a command found on the menus, a vertical hash

mark is used to indicate that a command is nested. So, to direct the user to the

Wafer Map command from the Tools item on the menu, we use Tools | Wafer

Map.

•

Screen text and syntax strings appear in this font.

• All numbers are decimal unless otherwise stated.

Chapter Description

1 Station Overview Describes general features, applications,

accessories, requirements, considerations and

recommendations for using the probe stations

and how to use the emergency stop button.

2 Station Specifications Describes specifications, dimensions and

requirements for all stations in the Summit

series.

3 Installing Provides an overview to installation as well as

requirements for lifting the probe station.

Continues with the unpacking of the station

and its setup.

4 Verifying and Operating Describes how to use the emergency stop

button, verify and use the probe station, and

explains how to test the thermal chuck and

joystick

5 Maintaining Explains how to maintain a Summit probe

station using preventative maintenance

procedures.

6 Troubleshooting Lists problems you may encounter while using

Summit probe stations, and explains how to

avoid or resolve those problems.

7 Service Provides contact phone numbers and

instructions to prepare the station for shipping.