3OM-1751-002w_G5S.pdf - 第197页
3OM-1751 2-29 1303-001 [4] XY -Axis Origin 1 and 2 The set parameters are used to maintain the beam condition (position) set up right after the machine was assembled. Use the values fed back automatically from the motion…
3OM-1751
2-281303-001
[3] Rectangular Angle X [deg]
These parameters represent the amount of angular deviations (X directions)
of the mark on the machine in comparison with the X directions in the
machine reference coordinate system.
The set parameters are used to check the three marks on the area of the
machine where only a little positional change can be made according to
temperature changes and adjust the beam X/Y axes such that they can cross
at right angles.
Xm(+)
Ym(+)
Yb(+)
Xb(+)
Yb(+)
Xb(+)
Xm'
Machine Reference
Coordinate System
Mark Coordinate
System
Beam Coordinate
System
Mark on Machine
Rectangular Angle
X [deg]
Head Origin
Pm. Machine Reference
Coordinate Origin
Standard Mark 2
Head Origin
Standard Mark 1
Xm-Ym
Xb-Yb
: Machine Reference
Coordinate System
: Real Beam Coordinate
System
F3B28
2.4 "Beam" Window
3OM-1751
2-291303-001
[4] XY-Axis Origin 1 and 2
The set parameters are used to maintain the beam condition (position) set up
right after the machine was assembled.
Use the values fed back automatically from the motion controller after the
Y-axis is zeroed (adjustment mode).
Master SideSlave Side
Origin Mark
(Origin Signal Position)
Beam
Beam
Zeroing
Direction
Zeroing
Direction
Y-Axis Origin Offset
= (+) Value
Limit Sensor
Y-Axis Origin Offset
= (+) Value
Origin Mark
(Origin Signal Position)
Origin Mark
(Origin Signal Position)
Origin Mark
(Origin Signal Position)
Limit Sensor
F3B29
Note
(a) The displayed parameters cannot be edited manually.
(b) The Y-axis origin offset indicates where the origin signal position of
the master axis is located when viewed in the zeroing direction from
the origin signal position of the slave axis.
A plus sign will be afxed when the origin signal position is located
in the same direction as the zeroing one. When it is located in the
opposite direction, a minus sign is afxed.
[5] Y-Axis Parallel Drive Origin
[6] [Return] button
When this button is pressed, the "Offset Data" window is returned.
[7] [Save] button
When this button is pressed, the input data is applied.
[Cancel] button
When this button is pressed, the input data is cancelled and the save data is
returned.
2.4 "Beam" Window
3OM-1751
2-301303-001
2.5 "Head" Window
[1] [2]
[3]
[4]
[4]
F3B30
[1] Offset button
When this button is pressed, the offset data for the selected tab is displayed.
[2] Offset Data Display Section
In this section, the offset data selected in step [1] is displayed.
[3] Page Change Button
Using this button, the offset editing page is changed.
[4] [Return] button
When this button is pressed, the "Offset Data" window is returned.
[5] [Save] button
When this button is pressed, the input data is saved.
[Cancel] button
When this button is pressed, the input data is cancelled and the save data is
returned.
Graphic
Development
2.5 "Head" Window