SIPLACE X-Series (SIPLACE X-Series S, from SC 708.1) Edition 05/2015 EN User manual.pdf - 第428页

Index User manual SIPLACE X-Series Version 05/2015 428

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User manual SIPLACE X-Series Index
Version 05/2015
427
Setting the cover foil tension
. . . . . . . . . . .176
Tape guide channel outlet
. . . . . . . . . . . . .176
Typeplate
. . . . . . . . . . . . . . . . . . . . . . . . . .176
X/Y accuracy
. . . . . . . . . . . . . . . . . . . . . . . . . .111
Y
Y axis
Distance measuring system
. . . . . . . . . . . .157
Guidance system
. . . . . . . . . . . . . . . . . . . .157
Permanent magnet (secondary part of the X-
axis linear motor)
. . . . . . . . . . . . . . . . . . . .157
Structure
. . . . . . . . . . . . . . . . . . . . . . . . . . .157
Y axis linear motor (primary part)
. . . 155, 157
Y axis structure
. . . . . . . . . . . . . . . . . . . . . . . . .157
Index User manual SIPLACE X-Series
Version 05/2015
428