DFD6361-Maintenance.pdf
2004-01 disco MAINTENANCE MANUAL Fully Automatic Dicing Sa w DFD6351 DFD6361 SOFTWARE VERSION 1.6 SERIES Copyrigh t of this docum ent is o wned by D isco Corp oration ( "Disco "). No part of this doc ument ma y…
2004-01
disco
MAINTENANCE MANUAL
Fully Automatic Dicing Saw
DFD6351
DFD6361
SOFTWARE VERSION 1.6 SERIES
Copyright of this document is owned by Disco Corporation ("Disco").
No part of this document may be copied or reproduced in any form
or by any means, without the express written permission of Disco.
Also, this document may not be disclosed or transferred to third
parties.
This document is printed on recyclable Lint-Free Paper.
- The blue paper is recyclable as used paper just like plain paper.
- The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
Recycle the blue paper only.)
UKFSME*016C
READ CAREFULLY BEFORE USING THIS
MANUAL
Introduction
This machine is a dicing saw to cut materials such as silicon wafers and glass
substrates (referred collectively as "workpiece" hereafter).
The machine contains rotary sections with parts that operate at high speed;
high-voltage sections with danger of causing electric shock; drive sections
where the workers' physical parts and/or clothing may get caught.
If N
2
gas is used in placed of clean air, the machine also has a N
2
gas ejection
section that might have adverse effect on the human body.
Failure to handle this machine properly may lead to serious injury or death.
Read before using the machine
Before using the machine, read this manual thoroughly and follow strictly all
the instructions set forth in this manual.
To assure safety during work associated to operation and maintenance of this
machine, it is important for every worker to know where the potential safety
hazards lie in this machine. Although it is difficult for Disco to foresee each
and every potential safety hazard, various precautionary notes and warnings
have been included in this manual and the separate Safety Manual to identify
and provide preventive knowledge against all foreseeable hazards. Strict
observance of all these precautions and other relevant instructions set forth in
this manual and the separate Safety Manual is thus essential for increased
safety assurance.
The safety features of the machine may be seriously affected, in case this
machine is modified without gaining the prior consent from Disco or repaired
in a manner not stated in this manual.
Therefore, never attempt to modify or repair this machine in a manner not
approved by Disco.
Extent of responsibility
- Disco is not responsible for any accident due to any of the following events.
- When equipment of another manufacturer is added to the machine
- When the machine or part of the machine is transported, reused, resold or
modified
- When supplied parts or parts designed by users are mounted on the
machine
- It is possible that we are not able to carry out repair or maintenance work for
reasons of safety and health care of our service or repair personnel, if the
machine user refuses to disclose the names and contents of processing
materials being used and/or processing piping, for reasons of confidentiality
or trade secret protection.
Hazard level
The safety precautions set forth in this document are classified into DANGER,
WARNING and CAUTION categories which represent three degree of
hazards latent in the machine. These categories are defined as detailed below
in accordance with the seriousness and probability level of the hazard. In
addition to the above three safety precaution levels, CAUTION without the
safety alert symbol ( ) and NOTICE are used to give safety usage
instructions to the user.
Before using the machine, be sure to read and understand all the associated
safety precautions set forth in the manual.
Hazard levels are classified as follows:
DANGER
If you cannot avoid the incident in question, a critical
situation in which either critical injury or death is very
likely to result.
This symbol is used for the incident in which the injury
is critical and there is high probability of occurrence.
WARNING
If you cannot avoid the incident in question, a serious
situation in which either critical injury or death may
result.
This symbol is used for the incident in which the injury
is serious but there is not high probability of
occurrence.
CAUTION
If you cannot avoid the incident in question, a medium
or slight injury may result.
This symbol is used for the incident in which the injury
is slight and there is not high probability of occurrence.
CAUTION
If you cannot avoid the incident in question, an accident
of property damage may occur.
NOTICE
Indicates the safe way of using the machine as well as
precautions to avoid accidents resulting in damage to
property.