DFD6361-Maintenance.pdf - 第574页
F-4 Safety ite ms for repl acing the air c lean unit c onsumable parts (Conti nued) NOTICE There i s a red pop- up valv e on the top of the air c lean unit. W hen the consumables of the ai r clean unit c ome to th e end …
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1-1. Replacing the Air Clean Unit Consumable Parts
Safety items for replacing the air clean unit consumable parts
WARNING
When performing the procedure set forth in this section, you have to
place your hands in a drive section. If you perform maintenance with
the power ON, your fingers or hands may be caught or cut off.
Turn OFF the machine and shut off the facility power supply before
starting this procedure.
Also, ensure that no other person touches the machine during
operation.
CAUTION
When performing maintenance with the outer cover removed,
observe the following precaution. If you stand the removed outer
cover against the machine, you may receive injury by the cover if it is
toppled by the earthquake or like that.
When you take off the outer cover for maintenance purposes, store it
sufficiently away from the working area.
NOTICE
- It is possible that air leakage might occur because rubber parts in
the air clean unit could be degraded by ozone that is included in the
air.
If you experience an air leakage occurred by such cause, contact
your nearest DISCO.
- Used air filters are soiled with dirt and oil content. Dispose them in
accordance with appropriate environmental regulations.
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Safety items for replacing the air clean unit consumable parts (Continued)
NOTICE
There is a red pop-up valve on the top of the air clean unit. When the
consumables of the air clean unit come to the end of their life cycles,
the red valve pops up to indicate that consumables need replacing.
In this case, replace the consumables to the new ones even before
the predetermined replacement timing.
Pop-up valve (red)
Normal status
When consumables need
replacing, the valve pops up.
[Air clean unit]
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Air clean unit exploded view
The illustration below shows the exploded view of the air clean unit.
Mist separator element
Bowl
Case
Case
Bowl
Joint
Air filter
Stopper
Spring
Pop-up valve (red)
Operation flow
The procedure for replacing the air clean unit consumable parts consists of the
following steps:
1-1-1 Preparation of replacing the air clean unit consumable parts
1-1-2 Replacing the mist separator element
1-1-3 Replacing the air filter
1-1-4 Completion of replacing the air clean unit consumable unit