DFD6361-Maintenance.pdf - 第330页

D-45 E1027 : Cassett e Positi on Error (Placement) Error c ode E1027 Message Cassette Position Erro r (Placem ent) W hat wa s detected There is n o input from any of th ree casse tte placem ent sensors, wh en the cassett…

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D-44
E0716 : Z2 cut water flow (SP) lower limit
Error code
E0716
Message
Z2 cut water flow (SP) lower limit
What was
detected
The flow rate of the Z2-axis wheel coolant water (Spray) drops to under the
predefined flow rate.
This flow rate setting can be made either on a device data or on the
WATER PROGRAM DATA MAINTENANCE screen [screen 5.3.5].
During what
operation it
occurred
At any time while the Z2-axis wheel coolant water is supplied.
State after
detection
The Z1- and Z2-axes retreat to the upper end and the X-axis returns to the
position under the microscope. The Y- and θ - axes reduce speed and stop.
Phenomenon Probable causes Remedy Reference
What to do
The wheel coolant
water flow rate
does not reach the
predefined flow
rate.
The flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Supply pressure has
declined.
Check the bending
or clogging in the
water supply pipe.
The error occurs
even when the
wheel coolant water
flow rate has
already reached the
predefined flow
rate.
The flow rate sensor
in the flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Thelineintheflow
rate sensor is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the flow rate of "SPRAY Z1" and "SPRAY Z2" on the
<WATER> Page.
(4) Turn ON the wheel coolant water and resumes operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-45
E1027 : Cassette Position Error (Placement)
Error code
E1027
Message
Cassette Position Error (Placement)
What was
detected
There is no input from any of three cassette placement sensors, when the
cassette presence/absence sensor is turned ON.
During what
operation it
occurred
During the full automatic operation and elevator operation.
State after
detection
The elevator operation stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
although the
cassette is placed
properly.
The sensor is
defective.
Replace the sensor.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Set the cassette to the elevator again.
(3) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-46
E1032 : Inspection cover sensor error.
Error code
E1032
Message
Inspection cover sensor error.
What was
detected
There was an input to the cover switch of the inspection cover.
During what
operation it
occurred
While the elevator axis vertically moves.
State after
detection
The elevator axis will immediately stop.
Phenomenon Probable causes Remedy Reference
What to do
The error is issued
even though the
cover is closed.
The cover sensor is
defective.
Replace the
sensor.
Contact your
nearest DISCO
Service Office.
The sensor wiring is
broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Close the inspection workpiece door.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" from the
recovery screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear