DFD6361-Maintenance.pdf - 第169页
B-97 3-4-1. Rem oving the spi nner table Procedur es for re moving the s pinner tabl e Step No. Do This (Continued from the previous section) 1 Press the <F1> button on the CHANGE FRAME S IZ E scre en [screen 6.1] …
B-96
3-4. Replacing the Spinner Table
Safety precautions for replacing the spinner table
CAUTION
If a scratched spinner table is set in position, the spinner table
flatness precision will be adversely affected. Before installing the
spinner table, make sure that the table base and spinner table
surface are not scratched.
Operation flow
The procedure for replacing the spinner table consists of the following steps.
3-4-1 Removing the spinner table
3-4-2 Mounting the spinner table
Before replacement
Have on hand the followings for replacement of the spinner table.
Alcohol
Lint-free cloth
3 mm Allen wrench (for removing the φ 8" spinner table)
5 mm Allen wrench (for removing the φ 300 mm spinner table)
B-97
3-4-1. Removing the spinner table
Procedures for removing the spinner table
Step No. Do This
(Continued from the previous section)
1
Press the <F1> button on the CHANGE FRAME SIZE screen
[screen 6.1].
- The upper arm moves to above the chuck table.
2
Press the <F2> button on the CHANGE FRAME SIZE screen
[screen 6.1].
- The lower arm moves to above the chuck table.
3
Visually make sure that all drive sections stop completely.
4
Open the rear arm section cover.
5
Remove the retaining screw of the spinner table.
M4 (for
φ
8" spinner table)
M6 (for
φ
300mm spinner table)
B-98
Procedures for removing the spinner table (Continued)
Step No. Do This
6
Remove the spinner table.
7
With a lint-free cloth moistened with alcohol, clean the removed
spinner table.
8
Enclose the cleaned spinner table in the packing material, to
avoid flaws, and then store it.
Continued in the next section.