DFD6361-Maintenance.pdf - 第242页
C-30 DI list (Co ntinued) Area Displ ayed as Sensor na me 2171 UV PL A TE R UP UV pla te upper rig ht sensor 2172 UV PL A TE R DN UV plate lower right sen sor 2173 UV PL A TE L UP UV pla te upper left sensor 2174 UV PL A…
C-29
DI list (Continued)
Area Displayed as Sensor name
2030 Small CST Detect
Elevator cassette check sensor
2031 UV N2 Low Lim
UV clean air flow rate sensor
2032 Upper Arm FRONT
Upper arm FRONT sensor
2033 Upper Arm REAR
Upper arm REAR sensor
2034 Upper Arm UP
Upper arm UP sensor
2035 Upper Arm DOWN
Upper arm DOWN sensor
2036 L arm Up-c UP
Lower arm upper cylinder UP sensor
2037 L arm Up-c DOWN
Lower arm upper cylinder DOWN sensor
2038 L arm Lo-c UP
Lower arm lower cylinder UP sensor
2039 L arm Lo-c DOWN
Lower arm lower cylinder DOWN sensor
2042 P.P Clamp OK
Push-pull clamp OK sensor
2043 P.P Clamp NG
Push-pull clamp NG sensor
2044 Ionizer Alarm (U)
Ionizer alarm UP
2045 Ionizer Alarm (L)
Ionizer alarm DOWN
2046 Ionizer A. Spare
Ionizer spare alarm
2047 Ionizer A. Spare
Ionizer spare alarm
2048 Coolant Water Z1
Wheel coolant water 1 flow sensor
2049 Coolant Water Z2
Wheel coolant water 2 flow sensor
2050 Water Cas Overflow
Water case overflow
2051 S/T UP
Spinner table UP sensor
2052 S/T DOWN
Spinner table DOWN sensor
2053 NCS Cover OPEN Z1
Noncontact setup cover OPEN sensor Z1
2054 NCS Cover CLOSE Z1
Noncontact setup cover CLOSE sensor Z1
2055 NCS Cover OPEN Z2
Noncontact setup cover OPEN sensor Z2
2056 NCS Cover CLOSE Z2
Noncontact setup cover CLOSE sensor Z2
2160 Arm Cover FRONT
Arm section cover FRONT sensor
2161 Arm Cover REAR
Arm section cover REAR sensor
2162 Frame FRONT
Centering frame FRONT sensor
2163 Cassette Detect F
Cassette presence/absence kinematic pin
FRONT sensor
2164 Cassette Detect R
Cassette presence/absence kinematic pin
RIGHT sensor
2165 Cassette Detect L
Cassette presence/absence kinematic pin
LEFT sensor
2166 Cov-Lock FRONT Cut
Cut cover (splash cover) left front lock
cylinder
2167 Cov-Lock REAR Cut
Cut cover (splash cover) left rear lock
cylinder
2168 Cov-Lock FRONT Han
Arm section cover right front lock cylinder
2169 Cov-Lock REAR Han
Arm section cover right rear lock cylinder
C-30
DI list (Continued)
Area Displayed as Sensor name
2171 UV PLATE R UP
UV plate upper right sensor
2172 UV PLATE R DN
UV plate lower right sensor
2173 UV PLATE L UP
UV plate upper left sensor
2174 UV PLATE L DN
UV plate lower left sensor
2175 UV WORK
UV section workpiece presence/absence
sensor
2176 Low Arm FRONT
Lower arm FRONT sensor
2177 Low Arm REAR
Lower arm REAR sensor
C-31
DO list
Area Displayed as Solenoid valve name
0000 Shutdown Request
Shutdown request signal
2000 Power OFF
Safety relay OFF
2001 Driver Power OFF
Driver power OFF
2002 Spindle EM-STOP
Spindle emergency stop
2003 Hnd. -PMD EM-STOP
Handling PMD emergency stop
2004 UV LAMP ON/OFF
UV lamp valve
2005 UV N2 ON/OFF
UV clean air valve
2012 UV PLATE
UV glass plate up/down valve
2016 Cut Water Z1
Wheel coolant water 1 valve
2017 Cut Water Z2
Wheel coolant water 2 valve
2018 Water Curtain
Water curtain valve
2019 Drain Water Z1
Wheel coolant water 1 drain
2020 Drain Water Z2
Wheel coolant water 2 drain
2021 SP Clean Water
Spinner nozzle cleaning water valve
2022 NCS Water
Noncontact setup water valve
2023 Nozzle Alcohol
Spinner rinse (alcohol) valve
2024 C/T work Vacuum
Chuck table workpiece vacuum valve
2025 C/T work Air Blow
Chuck table workpiece air blow valve
2026 C/T table Air Blow
Chuck table air blow valve
2027 S/T work Air Blow
Spinnertableairblowvalve
2028 Hi-PUMP Release
High-pressure pump release valve
2031 Hi-Pres. PUMP
High-pressure pump
2032 C/T Vac. ON
Chuck table vacuum ON
2034 S/T Vac. ON
Spinner table vacuum ON
2035 S/T Vac. OFF
Spinner table vacuum OFF
2036 Up Arm Vac-ON
Upper arm vacuum ON
2037 Up Arm Vac-OFF
Upper arm vacuum OFF
2038 Low Arm Vac-ON
Lower arm vacuum ON
2039 Low Arm Vac-OFF
Lower arm vacuum OFF
2040 S/T UP/DOWN
Spinner table UP/DOWN
2041 C/T Clmp Open
Chuck table frame clamp open valve
2042 C/T Clmp Close
Chuck table frame clamp close valve
2043 NCS Cover CLOSE Z1
Noncontact setup cover Z1 close valve
2044 NCS Cover OPEN Z1
Noncontact setup cover Z1 open valve
2045 NCS Cover CLOSE Z2
Noncontact setup cover Z2 close valve
2046 NCS Cover OPEN Z2
Noncontact setup cover Z2 open valve
2047 Hi-Pres. Air
High-pressure pump air valve