DFD6361-Maintenance.pdf - 第431页

D-146 O0519 : Rem ove the workpiece at W / T. Error c ode O0519 Message Remo ve t he workp ie ce at W/T . W hat wa s detected There is an input to the wor kpiece check sensor o f prealig nment stag e when you select &quo…

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D-145
O0518:CassetteswitchturnedOFF.
Error code
O0518
Message
Cassette switch turned OFF.
What was
detected
This error occurs if the cassette presence/absence sensor which is mounted
on the cassette stage of elevator section is OFF.
During what
operation it
occurred
During the full automatic operation and elevator operation.
State after
detection
The elevator operation stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
although the
cassette is placed
properly.
The sensor is
defective.
Replace the sensor.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Set the cassette to the elevator again.
(3) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-146
O0519 : Remove the workpiece at W/T.
Error code
O0519
Message
Remove the workpiece at W/T.
What was
detected
There is an input to the workpiece check sensor of prealignment stage
when you select "CONTINUE AFTER REMOVING WORKPIECE" on
the ERROR RECOVERY (HANDLING) screen, which is invoked by a
transfer error.
During what
operation it
occurred
While a workpiece is loading or unloading.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when there is
no workpiece on
the prealignment
stage.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the prealignment stage.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-147
O0520 : Remove the workpiece at C/T.
Error code
O0520
Message
Remove the workpiece at C/T.
What was
detected
There is an input to the chuck table vacuum sensor when you select
"CONTINUE AFTER REMOVING WORKPIECE" on the ERROR
RECOVERY (HANDLING) screen, which is invoked by a transfer error,
or while workpiece is being loaded onto the chuck table.
During what
operation it
occurred
While a workpiece is loading.
State after
detection
Transfer operation is stopped.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when there is
no workpiece on
the chuck table.
The sensor is
defective.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING) screen
is displayed.
(2) Remove the workpiece from the chuck table.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" on the
ERROR RECOVERY (HANDLING) screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear