DFD6361-Maintenance.pdf - 第37页

A-21 2-6. Spinn er Section Spinner s ection comp onent names The spinner section consists of the following components. Rotary section AC servom otor W as hin g n ozzl e Stepping motor for nozzle Main unit Spin ner se cti…

A-20

Workpiece chucking section

Workpiece chucking on the chuck table is carried out using a vacuum which is

produced by an ejector.

The vacuum path is shown in the following figure.

Workpiece vacuum

Frame clamp

Ceramic porous Chuck table

Table base

Table anchoring vacuum

A-21

2-6. Spinner Section

Spinner section component names

The spinner section consists of the following components.

Rotary section

AC servomotor

Washing nozzle

Stepping motor for nozzle

Main unit

Spinner section mechanism

The spinner section is structured as follows:

Main unit This is the base body of the spinner section. It raises

and lowers the spinner table with an air cylinder. The

cover that encloses the entire unit prevents cleaning

liquid from splashing.

Washing nozzle

section

The spray nozzle and drying nozzle, driven by the

stepping motor, move repeatedly across on the spinner

table.

Spinner rotary

section

Workpieces are placed on the spinner porous table and

vacuum-chucked. Cleaning, drying and transport

positioning are performed on the table rotated by the

AC servomotor.

A-22

Spinner section mechanism (Continued)

Spinner table Various types of tables corresponding to the following

DISCO frames are available. Replace them according to

the frame to be used.

[DFD6351]

For DTF2-8-1

For DTF2-6-1

For DTF2-6

For DTF2-5-1

[DFD6361]

For DTF2-12

For DTF2-8-1