DFD6361-Maintenance.pdf - 第658页

F-88 3-4-1. Rem oving the spi nner table Procedur es for re moving the s pinner tabl e Step No. Do This 1 Make sure that ther e is no water in the spinner c leaning section. - If there is any water in the spinner cleanin…

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F-87
3-4. Replacing the Spinner Table O-ring
Operation flow
The procedure for replacing the spinner table O-ring consists of the following
steps.
3-4-1 Removing the spinner table
3-4-2 Replacing the O-ring
Before replacement
Have on hand the following items for replacing the O-ring.
- Lint-free cloth
F-88
3-4-1. Removing the spinner table
Procedures for removing the spinner table
Step No. Do This
1
Make sure that there is no water in the spinner cleaning section.
- If there is any water in the spinner cleaning section, wipe it
away with a lint-free cloth and dry thoroughly.
2
Remove the spinner table from the table base.
Spinner table
Table base
- For the spinner table removal procedure;
See the section B-3-4, [Replacing the Spinner Table].
Continued in the next section.
F-89
3-4-2. Replacing the O-ring
Procedures for replacing the O-ring
WARNING
- If you operate the machine while the machine interior or floor is wet
with water, you may receive electric shock that could result in
serious injury or death.
If the machine or floor is wet with water, do not turn ON the facility
power source until it dries.
- If any touch panel control is inadvertently activated during
maintenance or inspection, unexpected machine operation may
cause death or serious injury.
While you don't use the touch panel, press the Disco's logo button
located at the upper left of the screen in order to lock up and
deactivate the touch panel.
Step No. Do This
(Continued from the previous section)
1
Remove the O-ring.
O-ring
Table base
2
Replace the O-ring with a new one.
Model Part Name Part No.
DFD6351 O-ring MSCO0554AN
DFD6361 O-ring MSCO0565AN
3
Mount the spinner table on the table base.
- For the spinner table installation procedure;
See the section B-3-4, [Replacing the Spinner Table].