DFD6361-Maintenance.pdf - 第478页
E-42 2-1. Maintena nce and Inspection Before Turning ON the Power Maintenance an d inspection be fore turning ON the facility pow er supply Perform the following inspection everyday before turning ON the facility power s…

E-41
2. Maintenance and Inspection
to Be Done Every Day
Summary of this section
This section describes the maintenance and inspection to be done everyday,
such as inspection before turning ON the facility power source and after
turning ON the machine.
Section No. Title Contents
2-1 Maintenance and
Inspection Before Turning
ON the Power
- Procedures for inspection to be
done before turning ON the
facility power source
2-2 Maintenance and
Inspection After Turning
ON the Power
- Procedures for inspection to be
done after turning ON the power
of the machine

E-42
2-1. Maintenance and Inspection
Before Turning ON the Power
Maintenance and inspection before turning ON the facility power supply
Perform the following inspection everyday before turning ON the facility
power source.
WARNING
Before performing any inspection set forth in this section, turn OFF
the facility power source and machine power, and lock out the circuit
breaker.
1 Are the safety labels clean and their markings legible?
- See the section 6 of Important Safety Information of Safety
Manual, [Safety Labels].
2 Does the air spindle axis turn freely?
3 Is the flange free of scratches and soiling?
4 Is the top surface of the chuck table free of soiling and damage?
5 Is the work taken over properly?

E-43
2-2. Maintenance and Inspection
After Turning ON the Power
Maintenance and inspection after turning ON the machine power
Perform the following inspection everyday after turning ON the machine
power.
1 Check the air supply pressure.
- Perform the steps stated in section B-1, [Starting up the Machine]
of the Operation Manual.
2 When the spindle is turning, does it produce any abnormal noise or
vibration?
3 Neither the splash cover nor arm section cover open during spindle
rotation.
4 Neither the splash cover nor arm section cover open during spinner
table rotation.
5 The Z-axis ascends to escape when the Z EM sequence is initiated.
6 Activate the EMO switch to check whether the Z-axis ascends to
the upper limit, the spindles stop rotating and the power supply
shuts off.
7 The pressure gauge of high-pressure pump reads a specified level.