DFD6361-Maintenance.pdf - 第303页
D-18 Error wi th a code beg inning w ith "A" Error codes beginning with the le tter A represent alignment-re lated errors. Please refe r to the section 2-6, [Remedies for Alig nment-Related Errors] regarding th…
D-17
Error with a code beginning with "V"
Error codes beginning with the letter V represent valve-related errors.
Please refer to the section 2-5, [Remedies for Valve-Related Errors] regarding
the way to handle the error.
Error Code Message
V0035 Cut data is illegal.
V0502 No workpiece in cassette.
V0503 Finger clamp error.
V0512 Workpiece vacuum error.
V0513 Spinner table vacuum error.
V0514 Spinner table up error.
V0515 Spinner table down error.
V0517 Spindle rpm error.
V0570 Pressure of S/T high pressure water dropped.
V0615 Error occurs in UV lamp.
V0624 Pressure of S/T high pressure water risen.
V1014 Up error (Lower arm Upper cylinder)
V1015 Down error (Lower arm Upper cylinder)
V1016 Up error (Lower arm Lower cylinder)
V1017 Down error (Lower arm Lower cylinder)
V1018 Upper Arm front end error.
V1019 Upper Arm rear end error.
V1020 Upper Arm up error.
V1021 Upper Arm down error.
V1022 Lower Arm front end error.
V1023 Lower Arm rear end error.
V1024 Upper Arm vacuum error.
V1025 Lower Arm vacuum error.
V1037 Remove the workpiece at UV Stage.
V1038 UV Glass plate close error.
V1039 UV Glass plate open error.
V1240 Can't Close Wheel Cover (Z1).
V1241 Can't Close Wheel Cover (Z2).
V1244 Can't Open Wheel Cover (Z1).
V1245 Can't Open Wheel Cover (Z2).
D-18
Error with a code beginning with "A"
Error codes beginning with the letter A represent alignment-related errors.
Please refer to the section 2-6, [Remedies for Alignment-Related Errors]
regarding the way to handle the error.
Error Code Message
A0531 Not found macro target.
A0532 Not found micro target.
A0533 Alignment time limit over.
A0534 Not found index check target.
A0535 Index check Y position error. (Y)
A0536 Index check X position error. (X)
A0537 Angle between channels error.
A0538 Theta adjustment retry over.
A0539 This work has been cut.
A0541 ANGLE: Slice level error.
A0542 ANGLE: Chip number is not enough.
A0543 ANGLE: Retry over.
A0551 The work thickness is thicker.
A0552 Focus maintenance has not been done.
A1164 Y axes will get near too much.
D-19
Error with a code beginning with "K"
Error codes beginning with the letter K represent errors related to kerf check.
Please refer to the section 2-7, [Remedies for Kerf Check-Related Errors]
regarding the way to handle the error.
Error Code Message
K0038 Kerf check: Not found.
K0039 Kerf check: Off center.
K0040 Kerf check: Too wide.
K0041 Kerf check: Too narrow.
K0042 Kerf check: Chipping size.
K0043 Kerf check: Chipping area.
K0044 Kerf check: Target not found.
K0045 Kerf check: Target position error.
K0046 Kerf check: Too wide. (Center to Chipping)
K0047 Kerf check: Too wide. (Include chipping)
K0048 Could not find kerf center.
K0049 Kerf center position error.