DFD6361-Maintenance.pdf - 第711页
Index-3 INDEX Shutt ing of f power ............................................................. B-104 Solenoid valv e chec k ......................................................... C-27 Solenoid valve, completion o f …
Index-2
INDEX
Hÿ
ÿÿ
ÿ
Halogen lamp, preparation of replacing ...............................F-13
Halogen lamp, replacing ...............................................F-12, 14
Hard disk drive,replacing......................................................F-96
Hub mount
replacement..................................................................B-9
Hub mount (1.2 kW Spindle)
mounting.....................................................................B-31
removing.....................................................................B-27
Hub mount (1.8 kW spindle)
mounting.....................................................................B-58
removing.....................................................................B-54
Hub mount (2.2 kW spindle)
mounting.....................................................................B-84
removing.....................................................................B-80
Hub Mount Replacement
1.2 kW Spindle............................................................B-24
1.8 kW Spindle............................................................B-51
2.2 kW Spindle............................................................B-77
Hub mount, conditioning .........................................C-5, 8, E-52
Iÿ
ÿÿ
ÿ
I/O check ........................................................................... C-28
Initial setting ......................................................................B-113
Inspection plate, removing..................................................B-105
Kÿ
ÿÿ
ÿ
Kerf check-related errors, remedies....................................D-121
Lÿ
ÿÿ
ÿ
LAST MENT DATE,
updating (for maintenance scheduler) ............................. C-68
Left-hand X-axis and its periphery, cleaning ........................E-85
Linear guide (frame centering guide axis), greasing ............E-64
Lock cylinder .................................................................A-47, 48
Lock cylinder of the arm section cover ................................A-48
Lock cylinder of the splash cover ........................................A-47
Lower arm axis, completion of greasing ............................E-112
Lower arm axis, greasing ..........................................E-105, 109
Lower arm axis, preparation of greasing ...........................E-108
Lower arm size, changing ...................................................B-93
Mÿ
ÿÿ
ÿ
MACHINE COMPONENTS AND FUNCTIONS.......................A-1
Machine outer cover .............................................................A-2
Machine outer cover, removing .......................F-54, 61, 92, 124
Machine protection .............................................................A-49
Main body section ...............................................................A-38
Main circuit breaker problems .............................................. D-3
Main power supply problems ............................................... D-4
Maintenance and inspection
after turning ON the power..........................................E-43
before turning ON the power .......................................E-42
Maintenance and inspection to be done every day ...............E-41
Maintenance and periodic inspection
(Check sheet 1)...................................................... Appendix-1
MAINTENANCE AND PERIODIC INSPECTION.....................E-1
Maintenance ITEM, changing
(for maintenance scheduler) ........................................... C-70
Maintenance ITEM, deleting
(for maintenance scheduler) ........................................... C-71
Maintenance scheduler ...................................................... C-64
MAINTENANCE SCHEDULER screen, calling up ............... C-65
Maintenance to be performed at 183-day intervals .............E-52
Maintenance to be performed at 30-day intervals ...............E-51
Maintenance to be performed at 365-day intervals .............E-75
Maintenance to be performed at 7-day intervals .................E-44
Maintenance whose interval differs depending on
the machine use conditions of the device ..........................E-3
Maker data .........................................................................C-72
Material safety data sheet (msds)...........................................G-3
Microscope LED light, replacing...........................................F-16
Microscope light source problems .......................................D-10
Microscope section .............................................................A-32
Mist separator element, replacing .........................................F-7
Monitor value of clean air pressure, setting ........................B-128
Monitor value of deionized water pressure, setting.............B-131
Monitor value of vacuum pressure, setting.........................B-134
Nÿ
ÿÿ
ÿ
NCS SENSOR CLEANING screen [4.8], calling up................E-6
Noise level ............................................................................G-2
Non-Contact setup amplifier, adjusting ................................E-12
Non-contact setup sensor, cleaning ......................................E-4
Non-Contact setup sensor, cleaning .....................................E-8
Non-Contact setup sensor, cleaning with abrasives..............E-10
Non-Contact setup sensor, completion of cleaning .............E-16
Oÿ
ÿÿ
ÿ
O-ring, replacing (for spinner table) ....................................F-89
Other errors, remedies.......................................................D-144
Outer cover (Spinner high-pressure pump), removing ....... F-101
Pÿ
ÿÿ
ÿ
Pad of the lower arm section, replacing ..............................F-40
Pad of the upper arm section, replacing ..............................F-37
Partition (left), removing ......................................................E-27
Personnel protection ...........................................................A-46
Piping, disconnecting ........................................................ F-126
Possible problems of the spindle due to stains ...................E-38
POWER lamp (power-on lamp) problems .............................D-6
Pre-alignment section .........................................................A-28
Pressure sensor ...............................................................B-112
Pressure setting ............................................................... B-117
Problems at power ON (problems invoking
no error code indication), remedies ...................................D-2
Problems invoking error code indication, remedies .............D-12
Push-pull axis, completion of greasing ................................E-96
Push-pull axis, greasing ................................................E-89, 95
Push-pull axis, preparation of greasing ...............................E-92
Rÿ
ÿÿ
ÿ
Removing the blade and flange/hub mount
cleaning the spindle ..................................................E-34
Removing the frame clump (for replacing the waterproof
cover/O-ring/O-ring of theta-axis) ....................................F-76
Removing the wheel cover
cleaning the spindle ..................................................E-35
Right-hand X-axis and its periphery, cleaning .....................E-83
Sÿ
ÿÿ
ÿ
Safety switch ................................................................A-47, 48
Safety switch of the arm section cover ................................A-48
Safety switch of the splash cover ........................................A-47
SECS/GEM setup ...............................................................C-73
Sensor adjustment .............................................................B-111
Sensor check ......................................................................C-27
Index-3
INDEX
Shutting off power .............................................................B-104
Solenoid valve check ......................................................... C-27
Solenoid valve, completion of replacing ..............................F-66
Solenoid valve, replacing ..............................................F-60, 63
Spindle
cleaning .....................................................................E-31
Spindle 1 carbon brush, completion of replacing .................F-28
Spindle 1 carbon brush, preparation of replacing ................F-18
Spindle 1 coolant water path, cleaning ................................E-70
Spindle 1 coolant water path, completion of cleaning ..........E-71
Spindle 1 coolant water path, preparation of cleaning .........E-69
Spindle 2 carbon brush, completion of replacing .................F-29
Spindle 2 carbon brush, preparation of replacing ................F-22
Spindle 2 coolant water path, cleaning ................................E-73
Spindle 2 coolant water path, completion of cleaning ..........E-74
Spindle 2 coolant water path, preparation of cleaning .........E-72
Spindle carbon brush, completion of replacing ....................F-28
Spindle carbon brush, preparation of replacing ...................F-18
Spindle carbon brush, replacing ..........................................F-17
Spindle coolant water flow rate sensor, replacing ................F-53
Spindle coolant water path, cleaning ...................................E-67
Spindle-axis section ............................................................A-35
Spinner high-pressure pump, assembling .........................F-107
Spinner high-pressure pump, completion of
replacing the consumable parts .....................................F-108
Spinner high-pressure pump, disassembling .....................F-104
Spinner high-pressure pump, disconnecting piping ...........F-102
Spinner high-pressure pump,
replacing consumable parts .............................................F-98
Spinner high-pressure pump,
replacing the consumable parts .....................................F-103
Spinner section ...................................................................A-21
Spinner table O-ring, replacing ............................................F-87
Spinner table, mounting ......................................................B-99
Spinner table, removing ......................................................B-97
Spinner table, removing ......................................................F-88
Spinner table, replacing ......................................................B-96
Spray tip of the spinner section, replacing ...........................F-30
Spray tip, completion of replacing .......................................F-36
Spray tip, preparation of replacing .......................................F-31
Spray tip, replacing .............................................................F-33
Tÿ
ÿÿ
ÿ
Touch Panel
cleaning .....................................................................E-39
Touch panel problems .......................................................... D-7
Transport section ................................................................A-30
TROUBLESHOOTING ......................................................... D-1
θ-axis section ......................................................................A-18
θ-axis sensor assembly section,
completion of greasing ...................................................E-117
θ-axis sensor assembly section, greasing ................. E-113, 116
θ-axis sensor assembly section,
preparation of greasing ..................................................E-115
Uÿ
ÿÿ
ÿ
Upper arm axis, completion of greasing ............................E-104
Upper arm axis, greasing ............................................E-97, 101
Upper arm axis, preparation of greasing ...........................E-100
Upper arm size, changing ...................................................B-95
USER DEFINE DATA screen [7.4], setting ......................... C-43
Utilities for Spinner Atomizing Nozzle, adjusting..................B-137
UV irradiation lamp replacement
completion ...............................................................F-120
preparation ..............................................................F-117
replacing ..................................................................F-118
shutting off power ....................................................F-116
UV irradiation lamp replacement .......................................F-114
UV irradiation unit frame size, changing..............................B-103
Vÿ
ÿÿ
ÿ
Vacuum ejector, cleaning ....................................................E-76
Vacuum pressure sensor ....................................................A-54
Valve-related errors, remedies..............................................D-76
Wÿ
ÿÿ
ÿ
Water case exterior, cleaning ..............................................E-47
Water case interior, cleaning ...............................................E-49
Waterproof cap, removing ...................................................F-23
Waterproof cover/O-ring/V-ring for theta-axis, replacing ......F-74
Waterproof cover/O-ring/V-ring, completion of replacing .....F-83
Waterproof cover/O-ring/V-ring, replacing ...........................F-80
Wiring, disconnecting .......................................................B-126
Xÿ
ÿÿ
ÿ
X-axis section .....................................................................A-11
X-axis, completion of greasing ............................................E-88
X-axis, greasing ............................................................E-79, 87
X-axis, preparation of greasing ...........................................E-82
Yÿ
ÿÿ
ÿ
Y (Y1 and Y2)-axis section .................................................A-13
Y (Y1 and Y2)-axis, moving ................................................E-26
Y-axis section roll cover, completion of replacing..................F-51
Y-axis section roll cover, preparation of replacing.................F-45
Y-axis section roll cover, replacing.................................. F-43, 48
Y-axis, completion of greasing ..........................................E-124
Y-axis, greasing ........................................................ E-118, 123
Zÿ
ÿÿ
ÿ
Z (Z1 and Z2)-axis section ..................................................A-16
Z1-axis, greasing ..............................................................E-130
Z1-axis, preparation of greasing .......................................E-128
Z2-axis, greasing ..............................................................E-133
Z2-axis, preparation of greasing .......................................E-131
Z-axis, completion of greasing ..........................................E-134
Z-axis, greasing ................................................................E-125
Zero clearance .................................................................B-121
ADDRESS LIST
JAPAN OFFICE ADDRESS
JAPAN
DISCO CORPORATION
Japan Head Office 14-3, Higashi Kojiya 2-chome
Ota-ku, Tokyo 144-8650
Phone 81-3-3743-0111
Overseas Sales /
PS Company Phone 81-3-3743-5813
FAX 81-3-3743-5810
Osaka Branch Office 3-12, Nishi Nakajima 6-chome
Yodogawa-ku, Osaka 532-0011
Phone 81-6-6302-4501
FAX 81-6-6302-0258
Kyushu Branch Office 16-14, Kamisuizenji 2-chome
Kumamoto-shi 862-0951
Phone 81-96-385-3411
FAX 81-96-384-1410
Sendai Regional Office 2nd. Floor, Sendai Bldg. Ekimae-kan
1-17, Itsutsubashi 1-chome
Aoba-ku, Sendai-shi, Miyagi 980-0022
Phone 81-22-262-3345
FAX 81-22-262-3346
Suwa Regional Office 3rd. Floor, Center Bldg.
12, Okita-machi, 3-chome
Suwa-shi, Nagano 392-0013
Phone 81-266-52-0814
FAX 81-266-52-0815
Nagoya Regional Office 1st. Floor, Kitamura No.4 Bldg.
80, Akegaoka, Meito-ku
Nagoya-shi, Aichi 465-0033
Phone 81-52-776-6350
FAX 81-52-776-6380