00198371-01_UM_SWS-EN.pdf - 第111页
User manual SIPLACE Wafer System (SWS) 6 Options Edition 04/2018 6.3 SWS wafer stretcher (expander) 111 6.3 SWS wafer stretcher (exp ander) 6 The SIPLACE W afer S ystem (SWS) can be config ured with the SWS wafe r stretc…
6 Options User manual SIPLACE Wafer System (SWS)
6.2 Optional components Edition 04/2018
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Fig. 6.2 - 4 Barcode scanner - example of installation on the magazine lift
(1) Barcode scanner
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User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
111
6.3 SWS wafer stretcher (expander)
6
The SIPLACE Wafer System (SWS) can be configured with the SWS wafer stretcher (expander)
option for two different wafer supports (8" or 12").
The SIPLACE SWS wafer stretcher (expander) consists of the following main assemblies.
– Stretcher
The stretcher stretches the wafer foil to increase the distances of the dies on it. 6
–Heater
The heater consists of a heating element and a fan. The fan blows heated air on to the wafer
foil. This reduces the sag of the wafer foil (less than 9 mm), so that the wafer can be trans-
ported back into the magazine. 6
PLEASE NOTE
The SWS wafer stretcher (expander) can not be retrofitted in the field.
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
112
6
Fig. 6.3 - 1 Wafer support with SIPLACE SWS Wafer Stretcher
(1) Stretcher frame with wafer support and downholder plate
(2) Heater fan
6.3.1 Safety instructions
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2
1
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CAUTION
Risk of burns due to high temperatures!
The heating can reach temperatures of up to 60°C.
Do not reach into the area around the fan with your hands.
Be careful when touching the wafer support.