00198371-01_UM_SWS-EN.pdf - 第46页
2 Operational safety User manual SIPLACE Wafer System (SWS) 2.4 Safety instructions for operation Edition 04/2018 46 2.4 Safety instructions for operation 2.4.1 Safety instructions for closing the side sliding doors The …
User manual SIPLACE Wafer System (SWS) 2 Operational safety
Edition 04/2018 2.3 Safety instructions for transportation
45
2.3 Safety instructions for transportation
2
The SIPLACE Wafer System can be transported using a suitable hand lift with the following spec-
ifications:
Carrying power (min.) 1000 kg
Fork length (min.) 1000 mm
Distance between the forks (min.)300, (max.) 525 mm (outer dimension) 2
2
WARNING
Risk of tilting!
There is a risk of the SIPLACE Wafer System tilting if the required specifications for the
fork-lift truck are not observed.
Only use the specified fork-lift for transportation.
Transportation of the SWS is described in section 4.1
, page 83.
PLEASE NOTE
Hand lift specifications
The necessary width of the fork lift presents a critical measure.
Make sure that the hand lift used fulfills the specified requirements.
2 Operational safety User manual SIPLACE Wafer System (SWS)
2.4 Safety instructions for operation Edition 04/2018
46
2.4 Safety instructions for operation
2.4.1 Safety instructions for closing the side sliding doors
The side sliding doors on the SIPLACE CA4 V2 can be opened for easier access to the SWS. To
avoid risk of injury when closing the side sliding doors on the machine, the operator must instruct
the personnel concerned to always follow the instructions below when handling the side sliding
doors.
2
When opening or closing the side sliding doors (item 2 of fig. 2.4 - 1, page 47), always take
hold of them at the handle (item 1 of fig. 2.4 - 1
, page 47) and press down the lever.
When closing, do not reach into the gap between the side sliding doors and the machine
panel.
When closing the side sliding doors, make sure that the area in which they are closed is free
of obstruction and that no other people are at risk of injury.
CAUTION
Risk of crushing hands!
Risk of crushing hands if the side sliding doors are not closed correctly.
Close the side sliding doors correctly.
User manual SIPLACE Wafer System (SWS) 2 Operational safety
Edition 04/2018 2.4 Safety instructions for operation
47
2
Fig. 2.4 - 1 Safety instructions for closing the side sliding doors
(1) Handle
(2) Side sliding doors
2.4.2 ESD safety
Only use nozzles that are identified as conductive. This is the only way to meet the requirements
for the ESD safety of the SIPLACE Wafer System (SWS).
(1)
(2)