00198371-01_UM_SWS-EN.pdf - 第42页
2 Operational safety User manual SIPLACE Wafer System (SWS) 2.2 Warning labels on the SIPLACE Wafer System Edition 04/2018 42 2.2.3 W arning label on the SIPLACE SWS wafer stretcher 2 2 Fig. 2.2 - 3 Wafer support with SI…
User manual SIPLACE Wafer System (SWS) 2 Operational safety
Edition 04/2018 2.2 Warning labels on the SIPLACE Wafer System
41
2.2.2.4 Warning label W210
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W210 in fig. 2.2 - 2, page 39, item no. 03009350-01 (quantity per SWS: 1)
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W209 in fig. 2.2 - 2, page 39, item no. 03009349-01 (quantity per SWS:1
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Warning label on the EMERGENCY STOP button
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For Australia, Canada, Mexico and USA, warn-
ing label W209 is affixed to the EMERGENCY
STOP buttons instead of the yellow ring.
2 Operational safety User manual SIPLACE Wafer System (SWS)
2.2 Warning labels on the SIPLACE Wafer System Edition 04/2018
42
2.2.3 Warning label on the SIPLACE SWS wafer stretcher
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Fig. 2.2 - 3 Wafer support with SIPLACE SWS Wafer Stretcher
CAUTION
Risk of burns due to high temperatures!
The heating can reach temperatures of up to 60°C.
Do not reach into the area around the fan with your hands.
Be careful when touching the wafer support.
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User manual SIPLACE Wafer System (SWS) 2 Operational safety
Edition 04/2018 2.2 Warning labels on the SIPLACE Wafer System
43
2.2.4 Warning on the Linear Dipping Unit (LDU X)
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Fig. 2.2 - 4 W201 [03009338-01] (quantity per LDU X: 1)
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Fig. 2.2 - 5 W204 [03009343-01] (quantity per LDU X: 1)
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Fig. 2.2 - 6 W18 (quantity per LDU X: 1)
Fig. 2.2 - 7 Warning labels on the LDU X
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SAFE OPERATION OF THE MACHINE
Safe operation of the machine depends absolutely on
the operator being familiar with the user manual and
safety instructions and putting them into effect.
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DANGER OF CRUSHING!
Reaching in here can lead to injuries to the arms
and hands.
Do not reach into the machine while it is running
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Harmful or irritant materials warning