00198371-01_UM_SWS-EN.pdf - 第131页

User manual SIPLACE Wafer System (SWS) 6 Options Edition 04/2018 6.3 SWS wafer stretcher (expander) 131 Fitting the stroke ring 6 Fig. 6.3 - 16 Wafer support - fitting the stroke ring  Insert the stroke ring (1).  Inse…

6 Options User manual SIPLACE Wafer System (SWS)

6.3 SWS wafer stretcher (expander) Edition 04/2018

130

Fitting the cover plate (for 12" wafer support only)

Fit the cover plate onto the wafer support, using the 4 screws.

Fig. 6.3 - 15 Wafer support - fitting the cover plate

User manual SIPLACE Wafer System (SWS) 6 Options

Edition 04/2018 6.3 SWS wafer stretcher (expander)

131

Fitting the stroke ring

Fig. 6.3 - 16 Wafer support - fitting the stroke ring

 Insert the stroke ring (1).

 Insert the four springs (3) into the four holes.

 Fit the four fixing discs (2) into place.

 Fasten the fixing discs into place with the fastening screws (4).

6 Options User manual SIPLACE Wafer System (SWS)

6.3 SWS wafer stretcher (expander) Edition 04/2018

132

Fitting the downholder plates

Fig. 6.3 - 17 SWS wafer stretcher (expander) - removing the downholder plate

 Align the lifting piston with the auxiliary tool (2) so that the opening points outwards.

 Place the downholder plates from the 12" retrofit kit onto the wafer support.

 Insert the conical fixing discs (3) into the hole.

 Loosely tighten the downholder plates with the screws.

 Insert the auxiliary tool (2) into the opening and fix into place with the lifting piston inside.

 Tighten all 4 screws (1) on the two downholder plates (4).