00198371-01_UM_SWS-EN.pdf - 第65页
User manual SIPLACE Wafer System (SWS) 3 Technical data and assemblies Edition 04/2018 3.2 Ambient conditions and connection values 65 3.2.6 Center of gravity for SWS 3 Fig. 3.2 - 2 Center of gravity for SWS 3 Center of …
3 Technical data and assemblies User manual SIPLACE Wafer System (SWS)
3.2 Ambient conditions and connection values Edition 04/2018
64
3.2.5.1 Overview of dimensions
3
Fig. 3.2 - 1 Overview of measurements - SIPLACE Wafer System
(1) 1650 mm
(2) 650 mm
(3) 1479 mm
(4) 510 mm
User manual SIPLACE Wafer System (SWS) 3 Technical data and assemblies
Edition 04/2018 3.2 Ambient conditions and connection values
65
3.2.6 Center of gravity for SWS
3
Fig. 3.2 - 2 Center of gravity for SWS
3
Center of gravity coordinates:
SWS X coordinate
Y coordinate
0 mm
650 mm
3 Technical data and assemblies User manual SIPLACE Wafer System (SWS)
3.3 Overview of the modules Edition 04/2018
66
3.3 Overview of the modules
3
Fig. 3.3 - 1 Overview of the SWS
3
(1) Gripper (2) Flip unit
(3) Installation position for options (die attach
unit or LDU X)
(4) Die ejector
(5) Supply unit (6) X unit
(7) Magazine lift
1
2
3
4
5
6
7