00198371-01_UM_SWS-EN.pdf - 第127页
User manual SIPLACE Wafer System (SWS) 6 Options Edition 04/2018 6.3 SWS wafer stretcher (expander) 127 Fitting the sensors on th e assembly brackets for t he 12" 6 Fig. 6.3 - 1 1 Wafer support - sensor 1 (1) Assemb…
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
126
Dismantling the sensors for the 8" stroke ring
The two sensors are fixed to the stroke ring in the 8" wafer support. These sensors need to be
dismantled for later refitting of the 8" stroke ring. In the case of the 12" wafer support, both sensors
are fitted to the wafer support in the SWS, using the brackets supplied.
6
Fig. 6.3 - 10 Wafer support - 8" stroke ring removed
Dismantle the heat protection plates fitted over the sensors.
Dismantle the two sensors (1) from the assembly brackets of the stroke ring.
Remove the two sensors and fit these on the two assembly brackets from the 12" retrofit kit.
1
1
1
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
127
Fitting the sensors on the assembly brackets for the 12"
6
Fig. 6.3 - 11 Wafer support - sensor 1
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
6
Fig. 6.3 - 12 Wafer support - sensor 2
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
Fit the two sensors (2) to the assembly bracket (1) from the 12" retrofit kit.
1
2
1
2
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
128
Fitting the sensors in the 12" wafer support
Fit the two sensors with the assembly brackets into the wafer support.
6
Fig. 6.3 - 13 Wafer support - fitting the sensors
Reconnect the sensor connections.
Fit the two sensors with the assembly brackets into the wafer support.