00198371-01_UM_SWS-EN.pdf - 第134页
6 Options User manual SIPLACE Wafer System (SWS) 6.3 SWS wafer stretcher (expander) Edition 04/2018 134
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
133
6.3.6.4 Differences in conversion from 12" to 8
The sensors need to be dismantled from the wafer support and fitted onto the 8" expansion plates.
See See “Wafer support - 8" stroke ring removed” on page 126.
The block needs to be dismantled form the clamp and used in place of the clamping level. See
See “Wafer support - loosening the clamp” on page 124.
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
134
User manual SIPLACE Wafer System (SWS) 7 Maintenance
Edition 04/2018
135
7 Maintenance
See also the SIPLACE Wafer System maintenance manual, German [00195962-xx], English
[[00195963-xx]