00198371-01_UM_SWS-EN.pdf - 第130页
6 Options User manual SIPLACE Wafer System (SWS) 6.3 SWS wafer stretcher (expander) Edition 04/2018 130 Fitting the c over plate (fo r 12" wafe r support only ) Fit the co ver plate onto the wafe r support, using th…
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
129
Fitting the block to the clamp
6
Fig. 6.3 - 14 Wafer support - fitting the block for the clamp
Fit the block (2) from the 12" retrofit kit onto the clamp (1).
1
2
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
130
Fitting the cover plate (for 12" wafer support only)
Fit the cover plate onto the wafer support, using the 4 screws.
6
Fig. 6.3 - 15 Wafer support - fitting the cover plate
1
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
131
Fitting the stroke ring
6
Fig. 6.3 - 16 Wafer support - fitting the stroke ring
Insert the stroke ring (1).
Insert the four springs (3) into the four holes.
Fit the four fixing discs (2) into place.
Fasten the fixing discs into place with the fastening screws (4).
2
3
4
1