00198371-01_UM_SWS-EN.pdf - 第78页
3 Technical data and assemblies User manual SIPLACE Wafer System (SWS) 3.4 Description of the SWS modules Edition 04/2018 78 3 Fig. 3.4 - 8 Wafer changer system (1) W afer changer with gripper (2) Magazine lift 1 2
User manual SIPLACE Wafer System (SWS) 3 Technical data and assemblies
Edition 04/2018 3.4 Description of the SWS modules
77
3
3.4.7 Wafer changer system
The wafer changer system consists of the magazine lift and the wafer changer with gripper.
The wafer changer system is needed to ensure a fully automatic production with the SWS. The
operator is only needed for refilling the magazine lift with new wafer magazines.
The wafers are provided in a wafer magazine. The wafer magazine is placed by the user into the
wafer magazine lift. The magazine lift lifts the wafer magazine into the appropriate height so that
the corresponding wafer is in handover position. In this position the wafer changer can take the
wafer out of the magazine and push it back in after the wafer has been processed.
The wafer changer consists primarily of the gripper unit and the guidance rails. The gripper unit
takes up the wafer and moves it to the position currently required.
PLEASE NOTE
No automatic ejector tool changeover
In this first version there is no automatic ejection tool changer available.
The SWS can therefore only continuously process dies which can be released using the
same ejector tool.
3 Technical data and assemblies User manual SIPLACE Wafer System (SWS)
3.4 Description of the SWS modules Edition 04/2018
78
3
Fig. 3.4 - 8 Wafer changer system
(1) Wafer changer with gripper
(2) Magazine lift
1
2
User manual SIPLACE Wafer System (SWS) 3 Technical data and assemblies
Edition 04/2018 3.4 Description of the SWS modules
79
3.4.7.1 Magazine lift
3
Fig. 3.4 - 9 Magazine lift
(1) Magazine rack with adjustable magazine plate
(2) Motor
(3) Wafer changer with cover
2
3
1