00198371-01_UM_SWS-EN.pdf - 第118页
6 Options User manual SIPLACE Wafer System (SWS) 6.3 SWS wafer stretcher (expander) Edition 04/2018 118 6.3.5 Setting the frame wid t h for 8" wafer supports The width of the wafer needs to be set for 8" wafer …
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
117
6.3.4.2 Settings
6
Fig. 6.3 - 4 SWS wafer stretcher (expander) - setting the stretching height
Loosen the screw (2) at all four points (1).
Push the screw (2) to the position for the required stretching height (2, 4, 6, or 8 mm).
Tighten the screw (2).
At both points (3), turn the screw to the position for the required stretching height (2, 4, 6, or
8 mm).
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6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
118
6.3.5 Setting the frame width for 8" wafer supports
The width of the wafer needs to be set for 8" wafer support. This is not needed for 12" wafer sup-
ports.
Wafers with a frame width of 10.5" (FF 105) or 10.8" (FF 108) can be processed. The mechanical
adjustments must be made at seven positions, depending on the frame width.
6.3.5.1 Preparations
Close all current processes on the SWS module.
Move the wafer table into the changeover position.
Select Manual operations -> Wafer handling systems -> Go to change position.
Open the clamp.
Select Manual operations -> Wafer handling systems ->Open wafer clamp.
– The clamp will open and the expansion ring will move downwards.
Open the expander
Select Manual operations -> Wafer handling systems ->Release stretcher.
– The downholder plate will move upwards.
Select Settings -> Shut down machine.
SWS GUI and Linux are shut down properly. 6
Switch off the SWS at the main switch.
CAUTION
Avoid damage to the gripper
The gripper could be damaged while you are working on the wafer support.
Push the gripper in the direction of the wafer lift and out of the wafer support working
area.
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
119
6.3.5.2 Settings
Fig. 6.3 - 5 Wafer support - setting the frame width
Remove the screws at the four points (1) and fit these in the required position (FF105 or FF
108).
Remove the screw at the relevant point (2) and fit it in the required position (FF105 or FF 108).
Loosen the screw at the relevant point (3) and fit it in the required position (FF105 or FF 108).
Remove the screw at the relevant point (4) and fit it in the required position (FF105 or FF 108).
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