00198371-01_UM_SWS-EN.pdf - 第51页
User manual SIPLACE Wafer System (SWS) 2 Operational safety Edition 04/2018 2.6 Safety features 51 Function If the SWS sliding door is opened upwards, the power s upply for the SWS lif t and the gripper will be interrupt…
2 Operational safety User manual SIPLACE Wafer System (SWS)
2.6 Safety features Edition 04/2018
50
2.6 Safety features
2.6.1 Sliding door
The inside of the SIPLACE Wafer System is covered by a sliding door. The sliding door and covers
serve as protective devices which prevent unauthorized access to the inside of the SIPLACE Wa-
fer System.
2
2
Fig. 2.6 - 1 Sliding door and covers
(1) SWS magazine lift
(2) SWS sliding door
(3) Grab recess for opening the SWS
(4) Door with safety switch
The SWS magazine lift is covered by a sliding door (item 1).
CAUTION
Risk of damage!
The sliding door and covers could be damaged if too much force is exerted.
Do not access or climb onto the SIPLACE Wafer System.
(2)
(3)
(4)
(1)
(4)
User manual SIPLACE Wafer System (SWS) 2 Operational safety
Edition 04/2018 2.6 Safety features
51
Function
If the SWS sliding door is opened upwards, the power supply for the SWS lift and the gripper will
be interrupted. A message is issued on the screen, notifying you that the sliding door has been
opened.
2.6.2 EMERGENCY STOP button and main switch
2
Fig. 2.6 - 2 Position of EMERGENCY STOP button and main switch on the SWS
(1) EMERGENCY STOP button
(2) Main switch
(1)
(2)
2 Operational safety User manual SIPLACE Wafer System (SWS)
2.6 Safety features Edition 04/2018
52
EMERGENCY STOP button with forced locking
The EMERGENCY STOP button is red and latches in the ON position when pressed. Pressing
the EMERGENCY STOP button triggers the safety cutoff (see also section 2.6.3
, page 53).
The operating status indicator (white) is switched off.
Main power switch in the OFF position
2
Main switch in ON position
After you switch on using the main switch, the SIPLACE Wafer System computer will boot.
Position switch, SWS sliding door
The position switch checks whether the SWS sliding door is open or closed. The position switch
on the SWS sliding door triggers the safety cutoff (lock) when the SWS sliding door is opened.
Individual components are disabled or remain enabled
DANGER
Lethal voltages!
Incorrect handling of the SIPLACE Wafer System can therefore result in death or severe
injury or considerable damage to equipment.
Some parts of the SIPLACE Wafer System carry potentially lethal voltages, even when it
is switched off at the main power switch:
Always follow the applicable accident prevention and DIN regulations (particularly EN
60204, part 1 or IEC 60204, part 1) and the applicable regulations in your own coun-
try.
The safety door to the power supply must ONLY be opened by appropriately qualified
and trained personnel.