00198371-01_UM_SWS-EN.pdf - 第129页
User manual SIPLACE Wafer System (SWS) 6 Options Edition 04/2018 6.3 SWS wafer stretcher (expander) 129 Fitting the block to the clamp 6 Fig. 6.3 - 14 Wafer support - fitting the block for the clamp Fit the block (2) f…
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
128
Fitting the sensors in the 12" wafer support
Fit the two sensors with the assembly brackets into the wafer support.
6
Fig. 6.3 - 13 Wafer support - fitting the sensors
Reconnect the sensor connections.
Fit the two sensors with the assembly brackets into the wafer support.
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
129
Fitting the block to the clamp
6
Fig. 6.3 - 14 Wafer support - fitting the block for the clamp
Fit the block (2) from the 12" retrofit kit onto the clamp (1).
1
2
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
130
Fitting the cover plate (for 12" wafer support only)
Fit the cover plate onto the wafer support, using the 4 screws.
6
Fig. 6.3 - 15 Wafer support - fitting the cover plate
1