SmartSM手册.pdf - 第60页
Offset Y : -0 .0 20 ~ 0 .0 20(mm) 连 接 项 目 连 接 项 目 AUTO Calibration

8. 臰劮扭衒栧歩吔ザ给来栧歩刟妈丑圄晄祀给枢偂ザ
9. 诽挏煭寿磇夺1皊栧歩斿泛﹦仔Head 2~6叽扭衒栧歩ザ
10. 寿扆朏磇夺歩帾宒或 Calibration 欧底﹦刟妈丑圄晄祀给枢偂ザ 覇圮评复丳逈甮栧歩偂诽炿刁<硴宠>挏钴ザ
给枢偂叵圮Fly-Fix Offset寿诣桌丳硴讪ザ
Fly to Fix Offset 皊栧歩堀凌偂妈丑ザ
Offset X : -0.050 ~ 0.050(mm)
Offset Y : -0.050 ~ 0.050(mm)
Fly Runout Offset 皊栧歩堀凌偂妈丑ザ
Offset X : -0.020 ~ 0.020(mm)

Offset Y : -0.020 ~ 0.020(mm)
连接项目连接项目
AUTO Calibration

SM400 User's Manual
画面导言画面导言
[System-Calibration] Fid
Setup the position of the fiducial mark for the fix camera located at the top of the ANC.
The following is the calibration procedure of the Fix 1 Camera.
1. On the following screen shown by clicking the <3.Fid> button, click on the <Move> button in the <Teach> area. Then, the fiducial
camera moves to the position of the corresponding fiducial mark
2. By clicking on the <Test> button, check if the fiducial mark is recognized correctly.
3. If the fiducial mark is not accurately recognized, perform teaching the fiducial mark position on the ANC accurately, setup the data
using <Tuning> and <Outline> functions, and check if accurately recognized by clicking on the <Test> button.
4. Upon successful recognition of the position, the following screen is shown. Then, locate the center position of the fiducial mark using
the <Scan> function, and update the existing data.