4OM-1208-011_w.pdf - 第118页
1-60-1 AIVEMT -ID 4.6 Replacement Procedure of V acuum Filters T ime of Replacement Replace the filters with new ones every three months. V acuu m Filt ers V acuu m Filt ers Fig. 4A59 Filter Holder Required Item Filter Re…

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(22) To check the results of the teaching operation, press the [Teach Result]
button.
The results are displayed, enabling you to check the offset data.
Fig. 4A58 "LINEAR MEASURE CLEANING" Window
([Teach Result] Button Selected)
(23) Press the [End] button.
When the teaching operation is executed, a confirmation dialog box
opens. Select either the [Yes] or the [No] button to determine whether
or not the data should be saved.
0606-009
4.5 Cleaning of Linear Measure Sensor

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AIVEMT-ID
4.6 Replacement Procedure of Vacuum Filters
Time of Replacement
Replace the filters with new ones every three months.
Vacuum
Filters
Vacuum
Filters
Fig. 4A59 Filter Holder
Required Item
Filter Replacement Jig
Fig. 4A60 Filter Replacement Jig
Replacement Procedure
(1) Slide the filter fastener to the left and release the lock of the filter
holder.
Filter UnlockedFilter Locked
Fig. 4A61
Notice
Be sure to slide the filter fastener so that it does not interfere with the
wiring, etc.
0606-009
4.6 Replacement Procedure of Vacuum Filters

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AIVEMT-ID
(2) Insert the filter replacement jig into the hole on the filter holder and
pull it up upward.
Hole on Filter Holder
Jig with pulled-out holder (filters)
Filter Replacement Jig
Fig. 4A62
(3) Replace the two vacuum filters on the pulled-out holder with new
ones.
(4) Direct the larger hole on the filter holder outward and insert the
holder with the filter replacement jig.
Be sure to push it deep enough until it stops (down to the lowest
limit).
Notice
The holder should not interfere with the wirings for valves, etc. In addition,
the wires should not be caught in the upper and lower areas of the top
block.
OK
NG
Filter Fastening Claw
<NG: Insufficient Insertion>
The upper surface of the
filter holder is higher than
that of the filter fastening
claw.
<OK: Sufficient Insertion>
The filter fastening claw is
higher than that of the filter
holder.
Fig. 4A63
0606-009
4.6 Replacement Procedure of Vacuum Filters