WinMCS_Manual(ENG) rev1.0.pdf - 第18页

18 WinMCS_Manua l(ENG) rev 1.0 Koh Y oung T echnology Inc.  Step Zo om Command 1. H SVON : Head Motor S ervo On 2. H SVOFF : Head Motor S ervo Off 3. L SVON : Lens Motor S ervo On 4. L SVOFF : Lens Motor S ervo Off 5. P…

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Service Manual
Koh Young Technology Inc.
3.5. Step Zoom Mode
It is used to test the state of StepZoom and Motion when StepZoom Head is installed.
StepZoom menu is activated when StepZoom is checked in Setup. (Including GUI setting)
Location: Menu Manual Motion StepZoom Mode
3.5.1. Step Zoom Mode Dialog
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StepZoom: It is able to control the camera resolution such as 20um, 15um or 10um for
inspection. Also, it consists of 2 motions, Head Axis and Lens Axis.
18
WinMCS_Manual(ENG) rev1.0
Koh Young Technology Inc.
Step Zoom Command
1. H SVON :
Head Motor Servo On
2. H SVOFF :
Head Motor Servo Off
3. L SVON :
Lens Motor Servo On
4. L SVOFF :
Lens Motor Servo Off
5. Position :
Current positions of Head, Lens Motor
6. Homing :
Head and Lens Motor Homing
7. Aging Start :
Head and Lens Motor Aging Start
8. Aging Stop :
Head and Lens Motor Aging Stop
9. Zoom1Pos :
Moving to the first Zoon position of Head and Lens
10. Zoom2Pos :
Moving to the second Zoon position of Head and Lens
11. Zoom3Pos :
Moving to the third Zoon position of Head and Lens
12. Zoom4Pos :
Moving to the forth Zoon position of Head and Lens
13. Zoom5Pos :
Moving to the fifth Zoon position of Head and Lens
19
Service Manual
Koh Young Technology Inc.
Step Zoom Jog
1. Move Head:
It moves the head motor as much as the input value
ex) 69 + enter: Head motor moves as much as 69mm.
2. Move Lens:
It moves the lens motor as much as the input value
ex) 30 + Lens: Lens Motor moves as much as 30mm.
ZOOM Axis Status & IO Status
1. HEAD STATE:
It displays the state of Head Motor (Servo On, Limit(+), Run, EMG, Origin, Done)
2. LENS STATE:
It displays the state of Lens Motor (Servo On, Limit(+), Run, EMG, Origin, Done)
3. HEAD IO:
It checks whether the motion of Head Motor is completed or not.
4. LENS IO:
It checks whether the motion of Head Motor is completed or not.
5. HEAD HOME:
Head Motor Homing
6. LENS HOME:
Lens Motor Homing