4OM-1431-006_w.pdf - 第126页

1-67 0802-002 5. Consumables and Important Servicing Parts 5. Consumables and Important Servicing Parts 5.1 List of Consumables Listed below are the parts that may be consumed within one year . Consult our marketing depa…

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(5) Shake it in the rotational direction and conrm that the it does not

rotate. After that, pull out the lter replacement jig carefully so as not to

pull up the inserted lter together and stay aoat.

(6) Note the following and slide the lter fastener to the right to lock the

lter holder.

•

Conrm

thatthelterfasteningclaw

islocated

attheupper

centerofthelterholder.

•

Conrmthattheballplungerislocked.

Ball Plunger Locked

Slide the filter fastener to the right.

Filter Unlocked Filter Locked

Locking Position of Filter

Fastening Claw

Filter Unlocked Filter Locked

Fig.

4A64

When the lter fastening claw cannot be locked after being slid because

it interferes with the sideface of the lter holder, it can be assumed that

a foreign substance exists in the hole or the lter holder is not inserted

sufciently far into the hole.

Check the lter holder that has interfered with the sideface.

If a foreign

substance exists in the hole, clean the lter holder to remove

the substance.

After the cleaning is completed and no foreign substance is found in the

hole, starting with Step (4).

Notice

Unlessthelterholderissetcorrectlyinplace,apickuperrorwill

occurorthelterwillcomeoffandcauseaninterferencewitha

head.

The head may also be damaged.

4.7 Replacement Procedure of Vacuum Filters

0709-001

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0802-002

5. Consumables and Important Servicing Parts

5.1 List of Consumables

Listed below are the parts that may be consumed within one year.

Consult our marketing department or sales agency whenever you need to

purchase these parts.

Table 4A14

Note

(a) The numbers entitled "Recommended Q'ty/Year" indicate the

referential values.

(b) Refer to "3. Maintenance Spots" and "4. Maintenance Method" for the

replacement procedures of these parts.

service personnel for detailed information.

1-68

0802-002

5.2 List of Important Servicing Parts

Listed below are the parts for which maintenance work is required in several

years. The list below is provided for your reference.

Note

Since replacement work of important service parts requires highly

sophisticated technique, consult our service personnel for details

Table 4A15

Block

Name

Product Name Part No. Part Name Q'ty

Recommended

Years

Note (a)

Exploded

View

Remarks

Head

Section

Solenoid Valve 630 141 4539 ACCESSORY,

24 3 Fig.M-6

Nozzle Shaft

Assembly Nozzle

Shaft Diffusion Plate

(Small)

630 146 4565

630 127 3235

630 127 7660

ASSY,

GUIDE, LINEAR

DISK

Sets

(1)

――― Fig.M-6

Hexagon Socket

Head Bolts M2×6

630 008 3057 BOLT, HEX-SCT 48 ――― Fig.M-6

For Nozzle Shaft

Attachment

Note (b)

O Ring for Nozzle

Shaft

SO-010-19

630 125 6382 SEAL 48 2 Fig.M-6

O Ring for Nozzle

Shaft

SO-010-21

630 055 3253 SEAL 24 2 Fig.M-6

Spring for Nozzle

Shaft

630 125 1417 SPRING, COMP 24 ――― Fig.M-6

Packing for Nozzle

DYR-3

630 127 3792 SEAL 48 2 Fig.M-6

O Ring for Filter

SO-006-12

630 076 5090 SEAL 72 2 Fig.M-6

Linear Measure

Sensor

Linear Measure

Sensor Light Emitter

630 157 4943

630 161 8654

SENSOR, PELEC

2Sets ――― Fig.M-6

Outer Diffusion Plate 630 128 2763 DISK 2 ――― Fig.M-6

Inner Diffusion Plate 630 127 7677 DISK 2 ――― Fig.M-6

Hexagon Socket

Head Bolt M1.6 × 4

630 129 7064 BOLT, HEX-SCT 14 ――― Fig.M-6

For Diffusion Plate

Attachment

Note (b)

Top Block 630 145 0018 BLOCK 24 ――― Fig.M-6

Cam Follower (φ2.5) 630 125 0328 CAMFOLLOWER 24 ――― Fig.M-6

Hexagon Socket

Head Bolt M1.6 × 3

630 129 7057 BOLT, HEX-SCT 48 ――― Fig.M-6

For Top Block

Attachment

Note (b)

Sensor PM-L24 630 080 5369 SENSOR,

PHOTO

2 3 Fig.M-4

Sensor PM-F24 630 125 0878 SENSOR,

PHOTO

10 3 Fig.M-2,3

Slip Ring 630 125 0441 COUPLING 2 2 Fig.M-5