00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第15页
© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems example: specificatio n 50 um at 4 Sigma (1 sigma = 12.5 um) C m <1,33 C m =1,33 C m >1,33 dispersion to high, Sigma > 12.5 um dispersion norm al…
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
Cm >1.33, Cpk >1.33
Cm <1.33, Cmk < 1.33
Cmk <1.33
Cm >1.33
Cm <1.33, Cmk < 1.33
example: specification 50 um at 4 Sigma
Machine Capability
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
example: specification 50 um at 4 Sigma (1 sigma = 12.5 um)
C
m
<1,33 C
m
=1,33
C
m
>1,33
dispersion to high,
Sigma > 12.5 um
dispersion normal,
Sigma = 12,5 um
dispersion low,
Sigma < 12,5 um
Machine Capability
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
C
mk
>1,33
C
mk
<1,33
C
mk
<1,33
dispersion low,
Sigma < 12.5 um,
offset too high,
process is not centered
dispersion low,
Sigma < 12.5 um,
offset too high,
process is not centered
dispersion low,
Sigma < 12.5 um,
no offset,
process is centered
example: specification 50 um at 4 Sigma (1 sigma = 12.5 um)
Machine Capability