00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第68页

© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems 0.00 25.00 50.00 75.00 100.00 125.00 150.00 175.00 200.00 -100 -80 -60 -40 -20 0 20 40 60 80 100 offset [µm] single value diagram placeme nt 1: X-offset c…

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© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
Dummy
graphical evaluation: color atlas
¾ the trend is clear visible, different color represent the deviation
Y-offset single value diagram measurement _01
Measurement Project in General
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
0.00 25.00 50.00 75.00 100.00 125.00 150.00 175.00 200.00
-100
-80
-60
-40
-20
0
20
40
60
80
100
offset [µm]
single value diagram
placement 1: X-offset
cm = 1.99, cmk = 1.98
placement 1: Y-offset
cm = 1.94, cmk = 1.83
Regression line (best adjustment of a line to the measured values)
number of placement
X/Y-axis
graphical evaluation: color atlas
Measurement Project in General
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
set point
(specification limit)
calculated value (sigma limit)
frequency plot: Gaussian Bell curve
set point value
(specification limit
e.g. +- 90 um)
-110.0 -90.0 -70.0 -50.0 -30.0 -10.0 10.0 30.0 50.0 70.0 90.0 110.0
0
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
34
36
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40
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Gaussian bell curve
Measurement Project in General