00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第80页

© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems single value diagram for each individual head 0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0 number of placements -200 -175 -150 -125 -100 -75 -50 -25 0…

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© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
example 2: x-y-plot single heads
-150 -100 -50 0 50 100 150
x-offset [µm]
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
x-y-diagram measurement 1
x-axis
y-axis
C&P head 1
C&P head 2
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
single value diagram for each individual head
0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0
number of placements
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
single value diagram
C&P head 1 y-offset
C&P head 2 y-offset
y-direction
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
X-Y plot for each individual head
-150 -100 -50 0 50 100 150
x-offset [µm]
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
x-y-diagram
C&P head 1
C&P head 2
x-axis
y-axis
Example 1: Offset between heads