00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第77页

© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems example 2: color atlas x-axis transport direction y-axis y-offset single value diagram measurement 1 head arrangement see slid e before: C&P head 1 is…

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© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
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x-axis
y-axis
Allocation of heads (gantries)
C&P head 2
C&P head 1
placement head arrangement
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
example 2: color atlas
x-axis
transport direction
y-axis
y-offset single value diagram measurement 1
head arrangement see slide before: C&P head 1 is o.k. (green), C&P head 2 up to 180 um
deviation (pink)
Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0
number of placement positions
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
Einzelwertdiagramm Messung_01 y-Versatz
single value diagram (measurement sequence), C&P head 1 and 2
upper specification
limit
(USL)
lower specification
limit
(LSL)
y-axis
single value diagram measurement 1 y-offset
number of placements
C&P
Head 1
C&P
Head 2
Example 1: Offset between heads