00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第28页

© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems local fiducial component fiducial global fiducial Glass Plate

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© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
global fiducial
component
fiducial
local fiducial
objective
glass plate
Glass Plate
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
local fiducial
component
fiducial
global fiducial
Glass Plate
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
ceramic component
Calculation: offset of component center in respect to the grids on the glass plate
(only xy values)
grids on glass plate 1-4
1xy
2xy
3xy
4xy
Offset Calculation