00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第81页
© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems X-Y plot for each individual head -150 -100 -50 0 50 100 150 x-offset [µm] -200 -175 -150 -125 -100 -75 -50 -25 0 25 50 75 100 125 y-offset [µm] x-y-diagr…
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
single value diagram for each individual head
0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0
number of placements
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
single value diagram
C&P head 1 y-offset
C&P head 2 y-offset
y-direction
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
X-Y plot for each individual head
-150 -100 -50 0 50 100 150
x-offset [µm]
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
x-y-diagram
C&P head 1
C&P head 2
x-axis
y-axis
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
¾ the machine is working with different operating points for each placement
angle, therefore the value of standard deviation increase
(rotating axis revolves in a eccentric motion)
¾ specification not in tolerance (C
m
-value)
¾ the measured average value of each individual placement angle is
shifted in relation to the placement position
¾ the overall average value, nevertheless, could be correct
¾ offset correction for each individual placement angle is possible from SW
version 406.01.
Dependency on placement angle
possible root cause
Example 2: Offset at Placement Angle