00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第71页
© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems example 1: shifted average va lue, caused by single offset ¾ numerical offset Measurement Project in General

© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
X-Y-diagram: placement 1
-100.0 -75.0 -50.0 -25.0 0.0 25.0 50.0 75.0 100.0
x-offset [µm]
-100
-80
-60
-40
-20
0
20
40
60
80
100
y-offset [µm]
set point value
(specification limit)
sigma-ellipse (limit)
X-axis
Y-axis
graphical evaluation: X-Y plot
Measurement Project in General

© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
example 1: shifted average value, caused by single offset
¾ numerical offset
Measurement Project in General

© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
x-direction
average value adjustment by use of a simple offset:
¾ single value diagram
0 5 10 15 20 25 30 35
number of placements
-80
-60
-40
-20
0
20
40
60
x-offset [µm]
single value diagram x-offset
x-axis
Average Value (shifted)