00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第79页
© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems example 2: x-y-plot single heads -150 -100 - 50 0 50 100 150 x-offset [µm] -200 -175 -150 -125 -100 -75 -50 -25 0 25 50 75 100 125 y-offset [µm] x-y-diag …
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0
number of placement positions
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
Einzelwertdiagramm Messung_01 y-Versatz
single value diagram (measurement sequence), C&P head 1 and 2
upper specification
limit
(USL)
lower specification
limit
(LSL)
y-axis
single value diagram measurement 1 y-offset
number of placements
C&P
Head 1
C&P
Head 2
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
example 2: x-y-plot single heads
-150 -100 -50 0 50 100 150
x-offset [µm]
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
x-y-diagram measurement 1
x-axis
y-axis
C&P head 1
C&P head 2
Example 1: Offset between heads
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
single value diagram for each individual head
0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0
number of placements
-200
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
y-offset [µm]
single value diagram
C&P head 1 y-offset
C&P head 2 y-offset
y-direction
Example 1: Offset between heads