00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第70页

© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems X-Y-diagram: placement 1 -100.0 -75.0 -50.0 -25.0 0.0 25.0 50.0 75.0 100.0 x-offset [µm] -100 -80 -60 -40 -20 0 20 40 60 80 100 y-offset [µm] set point va…

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© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
set point
(specification limit)
calculated value (sigma limit)
frequency plot: Gaussian Bell curve
set point value
(specification limit
e.g. +- 90 um)
-110.0 -90.0 -70.0 -50.0 -30.0 -10.0 10.0 30.0 50.0 70.0 90.0 110.0
0
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Gaussian bell curve
Measurement Project in General
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
X-Y-diagram: placement 1
-100.0 -75.0 -50.0 -25.0 0.0 25.0 50.0 75.0 100.0
x-offset [µm]
-100
-80
-60
-40
-20
0
20
40
60
80
100
y-offset [µm]
set point value
(specification limit)
sigma-ellipse (limit)
X-axis
Y-axis
graphical evaluation: X-Y plot
Measurement Project in General
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
example 1: shifted average value, caused by single offset
¾ numerical offset
Measurement Project in General