00193407-02 HWWS SIPLACE Machine Accuracy EN.pdf - 第90页

© Siemens AG . . Änderungen vorbehalten SIPLACE Placement Systems - NOTES

100%1 / 138
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
single value diagram
Explanation. as higher the xy coordinate, as bigger the deviation in x
single value diagram placement 1: x-offset
0.0 25.0 50.0 75.0 100.0 125.0 150.0 175.0 200.0
number of placements
-175
-150
-125
-100
-75
-50
-25
0
25
50
75
100
125
x-offset [µm]
x-direction
Trend Analysis
© Siemens AG . . Änderungen vorbehalten
SIPLACE
Placement Systems
-
NOTES
6 Recalibration S15 / F3
BE-Camera