SM411F_Service Manual.pdf - 第39页
X7043 SEDES Board(1) [5-5] CONTROL RACK (New) ◆ Picture of X7043 SEDES board ◆ Control of all axi s corresponding to 1 gantry (Excepting Y) - Control of X, Mirror axis pulse in/out - Control of Z1~Z6 Se-Des in/out - Co…
SM411(F) CONTROL RACK ASSY - VME Part
#10 X7043-SEDES Board
Æ FZ1~FZ6,FS,FX,FR1,FR3,FR5 Axis Control(11 axis)
Æ FZ1~FZ6 Servo AMP. Signal and Sensor Signal Serialize and De-Serialize
#11 X7043 STEP CONTROL Board
Æ Shuttle Conveyor, Work Width (PB AMP) and Conveyor Work (4 axis)
Æ Total (7 axis)
[5-3] CONTROL RACK –VME Part 2
35
SM411(F) Twin Servo Board
[5-4] CONTROL RACK (New)
◆ Picture of SM411 Twin Servo Board
◆ Gantry #1 front(Y1)-Front(Y2)
synchronization control
- Skew monitoring function
- Skew compensation function
◆ Gantry #2 rear(Y1)-Rear(Y2)
synchronization control
- Skew monitoring function
- Skew compensation function
◆ Impact sensing of gantry #1 and #2
- Velocity measuring function (LASS) and
then supervisory function by expected
position
- Supervisory function of impact avoiding
distance at emergency stop by using
velocity measuring function
36
X7043 SEDES Board(1)
[5-5] CONTROL RACK (New)
◆ Picture of X7043 SEDES board
◆ Control of all axis corresponding to 1
gantry (Excepting Y)
- Control of X, Mirror axis pulse in/out
- Control of Z1~Z6 Se-Des in/out
- Control of axis sensor (X, Mirror ,Z and
Theta) Des
- Pulse out (Theta1~3) for Step only
◆ Use of main clock of 20MHz
- Obtaining cable distance of 10M in the
specification
- Control of Se-Des in/out by using high
speed communication of 140MHz
◆ Design of 12 axis control board resulted
from epochal reduction of the number of
cable
37
X7043 SEDES Slave Board
[5-6] CONTROL RACK (New)
◆ Conversion of SEDES in/out signal
into pulse type in/out signal and I/O of
general contact point
◆ Function of each part
1. Z1, Z2 Servo AMP IF Part
2. Z3, Z4 Servo AMP IF Part
3. Z5, Z6 Servo AMP IF Part
4. SE-DES In/Out IF Part
( to X7043 SEDES Board)
5. X, Mirror , Z1, Z2 Axis Sensor
6. Z3, Z4, Z5, Z6 Axis Sensor
7. Theta1, Theta2, Theta3 Axis Sensor
38
X7043 STEP CONTROL Board
[5-7] CONTROL RACK (New)
◆ Picture of X7043 STEP control board
◆ Board for step driver only ( 8 axis)
- PB AMP 3 axis control
- Work axis 4 axis control
◆ Optimization of connector and cable by
designing for step driver only
◆ Improvement of design to optimize the
cost
39
SM411(F) VME IO ILL Board
[5-8] CONTROL RACK (New)
◆ Picture of SM411 VME IO ILL board
◆ Control of vacuum on and off for gantry 1 and 2
◆ illumination control (front/rear) for stage
camera
- Outer illumination: Control in 256 stages
- Inner illumination: Control in 256 stages
◆ Control of conveyor related IO
- Control of sensor input 12ch (Interrupted)
- Control of output 16ch
40